@article{KirchnerReisertPuetzetal.2012, author = {Kirchner, Patrick and Reisert, Steffen and P{\"u}tz, Patrick and Keusgen, Michael and Sch{\"o}ning, Michael Josef}, title = {Characterisation of polymeric materials as passivation layer for calorimetric H2O2 gas sensors}, series = {Physica Status Solidi (a)}, volume = {209}, journal = {Physica Status Solidi (a)}, number = {5}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.201100773}, pages = {859 -- 863}, year = {2012}, abstract = {Calorimetric gas sensors for monitoring the H₂O₂ concentration at elevated temperatures in industrial sterilisation processes have been presented in previous works. These sensors are built up in form of a differential set-up of a catalytically active and passive temperature-sensitive structure. Although, various types of catalytically active dispersions have been studied, the passivation layer has to be established and therefore, chemically as well as physically characterised. In the present work, fluorinated ethylene propylene (FEP), perfluoralkoxy (PFA) and epoxy-based SU-8 photoresist as temperature-stable polymeric materials have been investigated for sensor passivation in terms of their chemical inertness against H₂O₂, their hygroscopic properties as well as their morphology. The polymeric materials were deposited via spin-coating on the temperature-sensitive structure, wherein spin-coated FEP and PFA show slight agglomerates. However, they possess a low absorption of humidity due to their hydrophobic surface, whereas the SU-8 layer has a closed surface but shows a slightly higher absorption of water. All of them were inert against gaseous H₂O₂ during the characterisation in H₂O₂ atmosphere that demonstrates their suitability as passivation layer for calorimetric H₂O₂ gas sensors.}, language = {en} } @article{KirchnerSpelthahnSchoeningetal.2010, author = {Kirchner, Patrick and Spelthahn, H. and Sch{\"o}ning, Michael Josef and Henkel, H. and Schneider, A. and Friedrich, P. and Kolstad, J. and Berger, J.}, title = {Realisierung eines Polyimid-basierten kalorimetrischen Gassensors zur Inline-{\"U}berwachung der H2O2-Konzentration in aseptischen Abf{\"u}llanlagen}, series = {Sensoren und Messsysteme 2010 [Elektronische Ressource] : Vortr{\"a}ge der 15. ITG/GMA-Fachtagung vom 18. bis 19. Mai 2010 in N{\"u}rnberg / Informationstechnische Gesellschaft im VDE (ITG); VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik (GMA)}, journal = {Sensoren und Messsysteme 2010 [Elektronische Ressource] : Vortr{\"a}ge der 15. ITG/GMA-Fachtagung vom 18. bis 19. Mai 2010 in N{\"u}rnberg / Informationstechnische Gesellschaft im VDE (ITG); VDI/VDE-Gesellschaft Mess- und Automatisierungstechnik (GMA)}, publisher = {VDE Verlag}, address = {Berlin}, isbn = {978-3-8007-3260-9}, pages = {607 -- 612}, year = {2010}, language = {de} } @article{KloockMorenoBratovetal.2006, author = {Kloock, Joachim P. and Moreno, Lia and Bratov, A. and Huachupoma, S. and Xu, J. and Wagner, Torsten and Yoshinobu, T. and Ermolenko, Y. and Vlasov, Y. G. and Sch{\"o}ning, Michael Josef}, title = {PLD-prepared cadmium sensors based on chalcogenide glasses —ISFET, LAPS and \&\#956;ISE semiconductor structures}, series = {Sensors and Actuators B: Chemical. 118 (2006), H. 1-2}, journal = {Sensors and Actuators B: Chemical. 118 (2006), H. 1-2}, isbn = {0925-4005}, pages = {149 -- 155}, year = {2006}, language = {en} } @inproceedings{KloockMorenoHuachupomaetal.2005, author = {Kloock, Joachim P. and Moreno, Lia and Huachupoma, S. and Xu, J. and Wagner, Torsten and Bratov, A. and Doll, T. and Vlasov, Y. and Sch{\"o}ning, Michael Josef}, title = {Halbleiterbasierte Schwermetallsensorik auf der Basis von Chalkogenidgl{\"a}sern f{\"u}r zuk{\"u}nftige „Lab on Chip"-Anwendungen}, series = {7. Dresdner Sensor-Symposium - Neue Herausforderungen und Anwendungen in der Sensortechnik}, booktitle = {7. Dresdner Sensor-Symposium - Neue Herausforderungen und Anwendungen in der Sensortechnik}, editor = {Gerlach, Gerald}, publisher = {TUDpress, Verl. der Wissenschaften}, address = {Dresden}, isbn = {3-938863-29-3}, pages = {221 -- 224}, year = {2005}, language = {de} } @article{KloockMourzinaSchubertetal.2004, author = {Kloock, Joachim P. and Mourzina, Y. and Schubert, J. and Ermelenko, Y. and Sch{\"o}ning, Michael Josef}, title = {Pulsed laser deposition: A tool for fabricating thin-film microsensors}, series = {Biomedizinische Technik. 49 (2004), H. 2}, journal = {Biomedizinische Technik. 49 (2004), H. 2}, isbn = {0932-4666}, pages = {1032 -- 1033}, year = {2004}, language = {en} } @article{KloockMourzinaErmolenkoetal.2004, author = {Kloock, Joachim P. and Mourzina, Y.G. and Ermolenko, Y. and Doll, T. and Schubert, J. and Sch{\"o}ning, Michael Josef}, title = {Inorganic thin-film sensor membranes with PLD-prepared chalcogenide glasses: Challenges and implementation}, series = {Sensors. 4 (2004), H. 10}, journal = {Sensors. 4 (2004), H. 10}, isbn = {1424-8220}, pages = {156 -- 162}, year = {2004}, language = {en} } @article{KloockMourzinaYoshinobuetal.2002, author = {Kloock, Joachim P. and Mourzina, Y.G. and Yoshinobu, T. and Schubert, J. and Sch{\"o}ning, Michael Josef}, title = {Chalkogenidglassensoren f{\"u}r die Schwermetallanalytik}, series = {Sensoren und Mess-Systeme : Vortr{\"a}ge der 11. ITG/GMA-Fachtagung vom 11. bis 12. M{\"a}rz 2002 in Ludwigsburg / Veranst.: Informationstechnische Gesellschaft im VDE (ITG) ... Wiss. Tagungsleitung: C. D. Kohl ....}, journal = {Sensoren und Mess-Systeme : Vortr{\"a}ge der 11. ITG/GMA-Fachtagung vom 11. bis 12. M{\"a}rz 2002 in Ludwigsburg / Veranst.: Informationstechnische Gesellschaft im VDE (ITG) ... Wiss. Tagungsleitung: C. D. Kohl ....}, publisher = {VDE-Verl.}, address = {Berlin [u.a.]}, isbn = {3-8007-2675-0}, pages = {395 -- 398}, year = {2002}, language = {de} } @article{KloockPoghossianSchumacheretal.2006, author = {Kloock, Joachim P. and Poghossian, Arshak and Schumacher, K. and Rosenkranz, C. and Schultze, J. W. and M{\"u}ller-Veggian, Mattea and Sch{\"o}ning, Michael Josef}, title = {Funktionspr{\"u}fung und Charakterisierung von ionensensitiven Feldeffekttransistoren (ISFETs) auf Waferebene mittels Mikrotropfenzelle f{\"u}r den zuk{\"u}nftigen Einsatz in der Sensorproduktion}, series = {Sensoren und Messsysteme 2006 : Vortr{\"a}ge der 13. ITG/GMA-Fachtagung vom 13. bis 14. M{\"a}rz 2006 in Freiburg/Breisgau / Veranst.: Informationstechnische Gesellschaft im VDE (ITG) ; VDE/VDI-Gesellschaft Mess- und Automatisierungstechnik (GMA). Wiss. Tagungsleitung: L. M. Reindl}, journal = {Sensoren und Messsysteme 2006 : Vortr{\"a}ge der 13. ITG/GMA-Fachtagung vom 13. bis 14. M{\"a}rz 2006 in Freiburg/Breisgau / Veranst.: Informationstechnische Gesellschaft im VDE (ITG) ; VDE/VDI-Gesellschaft Mess- und Automatisierungstechnik (GMA). Wiss. Tagungsleitung: L. M. Reindl}, publisher = {VDE-Verl.}, address = {Berlin}, isbn = {3-8007-2939-3}, pages = {257 -- 260}, year = {2006}, language = {de} } @inproceedings{KloockSchubertErmelenkoetal.2006, author = {Kloock, Joachim P. and Schubert, J. and Ermelenko, Y. and Vlasov, Y. G. and Bratov, A. and Sch{\"o}ning, Michael Josef}, title = {Thin-film sensors with chalcogenide glass materials - a general survey}, series = {Biochemical sensing utilisation of micro- and nanotechnologies : Warsaw, [23rd - 26th] November 2005 / ed. by M. Mascini ...}, booktitle = {Biochemical sensing utilisation of micro- and nanotechnologies : Warsaw, [23rd - 26th] November 2005 / ed. by M. Mascini ...}, address = {Warsaw}, pages = {92 -- 97}, year = {2006}, language = {en} } @inproceedings{KloockSchoening2007, author = {Kloock, Joachim P. and Sch{\"o}ning, Michael Josef}, title = {Heavy metal detection with semiconductor devices based on PLD-prepared chalcogenide glass thin films}, series = {Armenian Journal of Physics}, booktitle = {Armenian Journal of Physics}, issn = {1829-1171}, pages = {95 -- 98}, year = {2007}, language = {en} }