@article{PrumeRoelofsSchmitzetal.2002,
  author    = {Prume, Klaus and Roelofs, Andreas and Schmitz, Thorsten and Reichenberg, Bernd},
  title     = {Compensation of the Parasitic Capacitance of a Scanning Force Microscope Cantilever Used for Measurements on Ferroelectric Capacitors of Submicron Size by Means of Finite Element Simulations / Prume, Klaus ; Roelofs, Andreas ; Schmitz, Thorsten ; Reichenb},
  series = {Japanese Journal of Applied Physics. 41 (2002), H. 11B},
  journal   = {Japanese Journal of Applied Physics. 41 (2002), H. 11B},
  isbn      = {0021-4922},
  pages     = {7198 -- 7201},
  year      = {2002},
  language  = {en}
}