@article{PrumeRaederTyholdtetal.2007, author = {Prume, Klaus and Raeder, H. and Tyholdt, F. and Booij, W. E.}, title = {Taking piezoelectric microsystems from the laboratory to production / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P.}, series = {Journal of Electroceramics. 19 (2007), H. 4}, journal = {Journal of Electroceramics. 19 (2007), H. 4}, isbn = {1385-3449}, pages = {357 -- 362}, year = {2007}, language = {en} } @article{PrumeTyholdtCalameetal.2007, author = {Prume, Klaus and Tyholdt, F. and Calame, F. and Raeder, H.}, title = {Chemically derived seeding layer for {100}-textured PZT thin films / Tyholdt, F. ; Calame, F. ; Prume, K. ; Raeder, H. ; Muralt, P.}, series = {Journal of Electroceramics. 19 (2007), H. 4}, journal = {Journal of Electroceramics. 19 (2007), H. 4}, isbn = {1385-3449}, pages = {311 -- 314}, year = {2007}, language = {en} }