@article{PoghossianWeldenBuniatyanetal.2021, author = {Poghossian, Arshak and Welden, Rene and Buniatyan, Vahe V. and Sch{\"o}ning, Michael Josef}, title = {An Array of On-Chip Integrated, Individually Addressable Capacitive Field-Effect Sensors with Control Gate: Design and Modelling}, series = {Sensors}, volume = {21}, journal = {Sensors}, number = {18}, publisher = {MDPI}, address = {Basel}, issn = {1424-8220}, doi = {10.3390/s21186161}, pages = {17}, year = {2021}, abstract = {The on-chip integration of multiple biochemical sensors based on field-effect electrolyte-insulator-semiconductor capacitors (EISCAP) is challenging due to technological difficulties in realization of electrically isolated EISCAPs on the same Si chip. In this work, we present a new simple design for an array of on-chip integrated, individually electrically addressable EISCAPs with an additional control gate (CG-EISCAP). The existence of the CG enables an addressable activation or deactivation of on-chip integrated individual CG-EISCAPs by simple electrical switching the CG of each sensor in various setups, and makes the new design capable for multianalyte detection without cross-talk effects between the sensors in the array. The new designed CG-EISCAP chip was modelled in so-called floating/short-circuited and floating/capacitively-coupled setups, and the corresponding electrical equivalent circuits were developed. In addition, the capacitance-voltage curves of the CG-EISCAP chip in different setups were simulated and compared with that of a single EISCAP sensor. Moreover, the sensitivity of the CG-EISCAP chip to surface potential changes induced by biochemical reactions was simulated and an impact of different parameters, such as gate voltage, insulator thickness and doping concentration in Si, on the sensitivity has been discussed.}, language = {en} } @article{HuckPoghossianBaeckeretal.2015, author = {Huck, Christina and Poghossian, Arshak and B{\"a}cker, Matthias and Reisert, Steffen and Kramer, Friederike and Begoyan, Vardges K. and Buniatyan, Vahe V. and Sch{\"o}ning, Michael Josef}, title = {Multi-parameter sensing using high-k oxide of barium strontium titanate}, series = {Physica status solidi (a)}, volume = {212}, journal = {Physica status solidi (a)}, number = {6}, publisher = {Wiley}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.201431911}, pages = {1259}, year = {2015}, abstract = {High-k perovskite oxide of barium strontium titanate (BST) represents a very attractive multi-functional transducer material for the development of (bio-)chemical sensors. In this work, a Si-based sensor chip containing Pt interdigitated electrodes covered with a thin BST layer (485 nm) has been developed for multi-parameter chemical sensing. The chip has been applied for the contactless measurement of the electrolyte conductivity, the detection of adsorbed charged macromolecules (positively charged polyelectrolytes of polyethylenimine) and the concentration of hydrogen peroxide (H2O2) vapor. The experimental results of functional testing of individual sensors are presented. The mechanism of the BST sensitivity to charged polyelectrolytes and H2O2 vapor has been proposed and discussed.}, language = {en} } @article{HuckPoghossianKerroumietal.2014, author = {Huck, Christina and Poghossian, Arshak and Kerroumi, Iman and Schusser, Sebastian and B{\"a}cker, Matthias and Zander, Willi and Schubert, J{\"u}rgen and Buniatyan, Vahe V. and Martirosyan, Norayr W. and Wagner, Patrick and Sch{\"o}ning, Michael Josef}, title = {Multiparameter sensor chip with Barium Strontium Titanate as multipurpose material}, series = {Electroanalysis}, volume = {26}, journal = {Electroanalysis}, number = {5}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1521-4109 (E-Journal); 1040-0397 (Print)}, doi = {10.1002/elan.201400076}, pages = {980 -- 987}, year = {2014}, abstract = {It is well known that biochemical and biotechnological processes are strongly dependent and affected by a variety of physico-chemical parameters such as pH value, temperature, pressure and electrolyte conductivity. Therefore, these quantities have to be monitored or controlled in order to guarantee a stable process operation, optimization and high yield. In this work, a sensor chip for the multiparameter detection of three physico-chemical parameters such as electrolyte conductivity, pH and temperature is realized using barium strontium titanate (BST) as multipurpose material. The chip integrates a capacitively coupled four-electrode electrolyte-conductivity sensor, a capacitive field-effect pH sensor and a thin-film Pt-temperature sensor. Due to the multifunctional properties of BST, it is utilized as final outermost coating layer of the processed sensor chip and serves as passivation and protection layer as well as pH-sensitive transducer material at the same time. The results of testing of the individual sensors of the developed multiparameter sensor chip are presented. In addition, a quasi-simultaneous multiparameter characterization of the sensor chip in buffer solutions with different pH value and electrolyte conductivity is performed. To study the sensor behavior and the suitability of BST as multifunctional material under harsh environmental conditions, the sensor chip was exemplarily tested in a biogas digestate.}, language = {en} } @article{BuniatyanMatirosyanAbouzaretal.2009, author = {Buniatyan, Vahe V. and Matirosyan, N. and Abouzar, Maryam H. and Schubert, J. and Zander, W. and Gevorgian, S. and Sch{\"o}ning, Michael Josef and Poghossian, Arshak}, title = {Capacitive field-effect pH sensor based on an electrolyte-ferroelectric-insulator-semiconductor structure}, series = {SENSOR 2009 : : 14th International Conference on Sensors, Technologies, Electronics and Applications; N{\"u}rnberg, Germany, 26 - 28 May 2009; proceedings; [part of] Sensor + Test Conference 2009 / AMA, Fachverband f{\"u}r Sensorik e.V}, journal = {SENSOR 2009 : : 14th International Conference on Sensors, Technologies, Electronics and Applications; N{\"u}rnberg, Germany, 26 - 28 May 2009; proceedings; [part of] Sensor + Test Conference 2009 / AMA, Fachverband f{\"u}r Sensorik e.V}, publisher = {AMA Service}, address = {Wunstorf}, isbn = {9783981099355}, pages = {317 -- 322}, year = {2009}, language = {en} } @article{BuniatyanAbouzarMartirosyanetal.2010, author = {Buniatyan, Vahe V. and Abouzar, Maryam H. and Martirosyan, Norayr W. and Schubert, J{\"u}rgen and Gevorgian, Spartak and Sch{\"o}ning, Michael Josef and Poghossian, Arshak}, title = {pH-sensitive properties of barium strontium titanate (BST) thin films prepared by pulsed laser deposition technique}, series = {Physica Status Solidi (A). 207 (2010), H. 4}, journal = {Physica Status Solidi (A). 207 (2010), H. 4}, isbn = {1862-6300}, pages = {824 -- 830}, year = {2010}, language = {en} }