@article{MuellerVeggianConteColauttietal.1998,
  author    = {M{\"u}ller-Veggian, Mattea and Conte, V. and Colautti, P. and De Nardo, L.},
  title     = {Microdosimetric spectra down to 70 nm},
  series = {Annual report / Istituto Nazionale di Fisica Nucleare, LNL, Laboratori Nazionali di Legnaro. 1997 (1998)},
  journal   = {Annual report / Istituto Nazionale di Fisica Nucleare, LNL, Laboratori Nazionali di Legnaro. 1997 (1998)},
  pages     = {67 -- 68},
  year      = {1998},
  language  = {en}
}
@article{ThustSchrothToepleretal.1998,
  author    = {Thust, M. and Schroth, P. and T{\"o}pler, A. and Sch{\"o}ning, Michael Josef and M{\"u}ller-Veggian, Mattea and Kordos, P. and L{\"u}th, H.},
  title     = {Improving the detection limit of a capacitive sensor by means of a diffusion barrier},
  series = {Eurosensors XII : proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Southampton, UK, 13 - 16 September 1998 / ed. by N. M. White ; Vol. 1},
  journal   = {Eurosensors XII : proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Southampton, UK, 13 - 16 September 1998 / ed. by N. M. White ; Vol. 1},
  publisher = {Inst. of Physics Publ.},
  address   = {Bristol [u.a.]},
  isbn      = {0-7503-0595-9},
  pages     = {507 -- 510},
  year      = {1998},
  language  = {en}
}
@article{SchoeningThustSteffenetal.1998,
  author    = {Sch{\"o}ning, Michael Josef and Thust, M. and Steffen, A. and M{\"u}ller-Veggian, Mattea},
  title     = {Kapazitives Sensorarray in Siliziumtechnik f{\"u}r die Prozeß{\"u}berwachung},
  series = {ITG-Fachbericht. 148 (1998)},
  journal   = {ITG-Fachbericht. 148 (1998)},
  isbn      = {0341-0196},
  pages     = {257 -- 263},
  year      = {1998},
  language  = {de}
}
@article{SchoeningThustMuellerVeggianetal.1998,
  author    = {Sch{\"o}ning, Michael Josef and Thust, M. and M{\"u}ller-Veggian, Mattea and Kordos, P.},
  title     = {A novel silicon-based sensor array with capacitive EIS structures},
  series = {Sensors and Actuators B. 47 (1998), H. 1-3},
  journal   = {Sensors and Actuators B. 47 (1998), H. 1-3},
  isbn      = {0925-4005},
  pages     = {225 -- 230},
  year      = {1998},
  language  = {en}
}