@article{SchoeningSchaubZundeletal.1995,
  author    = {Sch{\"o}ning, Michael Josef and Schaub, A. and Zundel, A. and Beckers, L. and Schubert, J. and Zander, W. and Kordos, P. and L{\"u}th, H.},
  title     = {Pulsed laser deposition as a novel thin film preparation method for silicon-based field effect sensors},
  series = {Proceedings of the 25th European Solid State Device Research Conference : the Netherlands Congress Centre, The Hague, the Netherlands, 25th - 27th September 1995 / ESSDERC '95. Ed. by H. C. de Graaff},
  journal   = {Proceedings of the 25th European Solid State Device Research Conference : the Netherlands Congress Centre, The Hague, the Netherlands, 25th - 27th September 1995 / ESSDERC '95. Ed. by H. C. de Graaff},
  publisher = {Ed. Fronti{\`e}res},
  address   = {Gif-sur-Yvette},
  isbn      = {2-86332-182-X},
  pages     = {601 -- 604},
  year      = {1995},
  language  = {en}
}