@article{PrumeGerberRoelofsetal.2004,
  author    = {Prume, Klaus and Gerber, P. and Roelofs, A. and K{\"u}geler, C.},
  title     = {Effects of the top-electrode size on the piezoelectric properties (d33 and S) of lead zirconate titanate thin films / Gerber, P. ; Roelofs, A. ; K{\"u}geler, C.; B{\"o}ttger, U. ; Waser, R. ; Prume, K. ;},
  series = {Journal of Applied Physics . 96 (2004), H. 5},
  journal   = {Journal of Applied Physics . 96 (2004), H. 5},
  isbn      = {0021-8979},
  pages     = {2800 -- 2804},
  year      = {2004},
  language  = {en}
}