@inproceedings{SpannhakeSchulzHelwigetal.2006,
  author    = {Spannhake, Jan and Schulz, Olaf and Helwig, Andreas and Krenkow, Angelika and M{\"u}ller, Gerhard and Doll, Theodor},
  title     = {High-temperature MEMS heater platforms: long-term performance of metal and semiconductor heater materials},
  url       = {http://nbn-resolving.de/urn:nbn:de:hbz:a96-opus-1513},
  year      = {2006},
  abstract  = {Micromachined thermal heater platforms offer low electrical power consumption and high modulation speed, i.e. properties which are advantageous for realizing nondispersive infrared (NDIR) gas- and liquid monitoring systems. In this paper, we report on investigations on silicon-on-insulator (SOI) based infrared (IR) emitter devices heated by employing different kinds of metallic and semiconductor heater materials. Our results clearly reveal the superior high-temperature performance of semiconductor over metallic heater materials. Long-term stable emitter operation in the vicinity of 1300 K could be attained using heavily antimony-doped tin dioxide (SnO2:Sb) heater elements.},
  subject      = {Biosensor},
  language  = {en}
}