@article{KaemperLehrEhrfeldetal.1994,
  author    = {K{\"a}mper, Klaus-Peter and Lehr, H. and Ehrfeld, W. and Michel, F.},
  title     = {LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; K{\"a}mper, K.-P.; Michel, F.; Schmidt, M.},
  series = {1994 IEEE Symposium on Emerging Technologies \& Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN},
  journal   = {1994 IEEE Symposium on Emerging Technologies \& Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN},
  address   = {Piscataway, N.J.},
  isbn      = {0780321146},
  pages     = {43 -- 47},
  year      = {1994},
  language  = {en}
}