@article{PrumeRaederTyholdtetal.2007, author = {Prume, Klaus and Raeder, H. and Tyholdt, F. and Booij, W. E.}, title = {Taking piezoelectric microsystems from the laboratory to production / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P.}, series = {Journal of Electroceramics. 19 (2007), H. 4}, journal = {Journal of Electroceramics. 19 (2007), H. 4}, isbn = {1385-3449}, pages = {357 -- 362}, year = {2007}, language = {en} } @article{PrumeMuraltCalameetal.2007, author = {Prume, Klaus and Muralt, P. and Calame, F. and Schmitz-Kempen, T.}, title = {Piezoelectric thin films: evaluation of electrical and electromechanical characteristics for MEMS devices / Prume, K. ; Muralt, P. ; Calame, F. ; Schmitz-Kempen, T. ; Tiedke, S. ;}, series = {IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 54 (2007), H. 1}, journal = {IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control. 54 (2007), H. 1}, isbn = {0885-3010}, pages = {81 -- 14}, year = {2007}, language = {en} } @article{PrumeMuraltCalameetal.2007, author = {Prume, Klaus and Muralt, Paul and Calame, Florian and Schmitz-Kempen, Thorsten}, title = {Extensive electromechanical characterization of PZT thin films for MEMS applications by electrical and mechanical excitation signals / Prume, Klaus ; Muralt, Paul ; Calame, Florian ; Schmitz-Kempen, Thorsten ; Tiedke, Stephan}, series = {Journal of Electroceramics. 19 (2007), H. 4}, journal = {Journal of Electroceramics. 19 (2007), H. 4}, isbn = {1385-3449}, pages = {407 -- 411}, year = {2007}, language = {en} } @article{Prume2007, author = {Prume, Klaus}, title = {Electrical and electromechanical characterization of piezoelectric thin films in view of MEMS application / Tiedke, S. ; Prume, K. ; Schmitz-Kempen, T.;}, pages = {702}, year = {2007}, language = {en} } @article{PrumeTyholdtCalameetal.2007, author = {Prume, Klaus and Tyholdt, F. and Calame, F. and Raeder, H.}, title = {Chemically derived seeding layer for {100}-textured PZT thin films / Tyholdt, F. ; Calame, F. ; Prume, K. ; Raeder, H. ; Muralt, P.}, series = {Journal of Electroceramics. 19 (2007), H. 4}, journal = {Journal of Electroceramics. 19 (2007), H. 4}, isbn = {1385-3449}, pages = {311 -- 314}, year = {2007}, language = {en} } @article{PrumeBooijVogletal.2007, author = {Prume, Klaus and Booij, W. E. and Vogl, A. H. and Wang, D. T.}, title = {A simple and powerful analytical model for MEMS piezoelectric multimorphs / Booij, W. E. ; Vogl, A. H. ; Wang, D. T. ; Tyholdt, F. ; Ostbo, N. P. ; Raeder, H. ; Prume, K.}, series = {Journal of Electroceramics. 19 (2007), H. 4}, journal = {Journal of Electroceramics. 19 (2007), H. 4}, isbn = {1385-3449}, pages = {387 -- 393}, year = {2007}, language = {en} }