@article{KurowskiSchultzeLuethetal.2001,
  author    = {Kurowski, A. and Schultze, J.W. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef},
  title     = {Micro- and nanopatterning of sensor chips by means of macroporous silicon},
  series = {Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany. Ernst Obermeier (Ed.)},
  journal   = {Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany. Ernst Obermeier (Ed.)},
  publisher = {Springer},
  address   = {Berlin [u.a.]},
  isbn      = {3-540-42150-5},
  pages     = {640 -- 643},
  year      = {2001},
  language  = {en}
}