@article{Kaemper1994,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Fertigung von Mikroaktoren mittels LIGA-Technik. Lehr, H.; Abel, S.; Chritz, G.; Ehrfeld, W.; K{\"a}mper, K.-P.; Michel, F.},
  series = {Proceedings Microengineering 94 : Messe Stuttgart 17. - 19. Mai 1994 / Messe Stuttgart International},
  journal   = {Proceedings Microengineering 94 : Messe Stuttgart 17. - 19. Mai 1994 / Messe Stuttgart International},
  address   = {Stuttgart},
  pages     = {getr. Z{\"a}hlung},
  year      = {1994},
  language  = {de}
}