@article{KaemperAbrahamEhrfeldetal.1998, author = {K{\"a}mper, Klaus-Peter and Abraham, M. and Ehrfeld, W. and Hessel, V.}, title = {Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; K{\"a}mper, K.-P.; Lacher, M.; Picard, A.}, series = {Microelectronic Engineering. 41-42 (1998)}, journal = {Microelectronic Engineering. 41-42 (1998)}, isbn = {0167-9317}, pages = {47 -- 52}, year = {1998}, language = {en} } @article{KaemperDoepperEhrfeldetal.1998, author = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Ehrfeld, W. and Oberbeck, S.}, title = {A self-filling low-cost membrane micropump}, series = {Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division}, journal = {Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division}, publisher = {IEEE Service Center}, address = {Piscataway, NJ}, isbn = {078034412X}, pages = {432 -- 437}, year = {1998}, language = {en} } @article{KaemperBergBegemannetal.1998, author = {K{\"a}mper, Klaus-Peter and Berg, U. and Begemann, M. and Hagemann, B. (u.a.)}, title = {Series production and testing of a micro motor. Serienfertigung und Pr{\"u}fung eines Mikromotors}, series = {Actuator 98 : 6th International Conference on New Actuators ; 17 - 19 June, 1998, Bremen, Germany ; conference proceedings / ed.: Hubert Borgmann ...}, journal = {Actuator 98 : 6th International Conference on New Actuators ; 17 - 19 June, 1998, Bremen, Germany ; conference proceedings / ed.: Hubert Borgmann ...}, publisher = {Messe Bremen}, address = {Bremen}, isbn = {3-933339-00-6}, pages = {552 -- 555}, year = {1998}, language = {en} }