@misc{Kaemper2008,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Lecture notes Sensors and Actuators WS 2008/2009},
  year      = {2008},
  abstract  = {Password necessarily. Access only for Students by Prof. Dr. Klaus-Peter K{\"a}mper. Winter semester 2008/2009. 488 pages (pdf) Contents 1. Introduction 2. Introduction to Sensors 3. Introduction to Microfabrication 4. Pressure Sensors 5. Acceleration Sensors 6. Angular Rate Sensors 7. Position Sensors 8. Flow Sensors 9. Piezoelectric Actuators 10. Magnetostrictive Actuators 11. Actuators based on Shape Memory Alloys 12. Actuators based on Electrorheological Fluids 13. Actuators based on Magnetorheological Fluids 14. Index},
  subject      = {Sensor},
  language  = {en}
}
@article{Kaemper2002,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Die Mikroaktorik wird erwachsen},
  series = {INNO : innovative Technik - neue Anwendungen / Hrsg.: IVAM Fachverband f{\"u}r Mikrotechnik, Dortmund. Ausgabe 22 (2002)},
  journal   = {INNO : innovative Technik - neue Anwendungen / Hrsg.: IVAM Fachverband f{\"u}r Mikrotechnik, Dortmund. Ausgabe 22 (2002)},
  pages     = {4 -- 5},
  year      = {2002},
  language  = {de}
}
@article{Kaemper1996,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Development of low-cost injection moulded micropumps. Entwicklung von kosteng{\"u}nstigen, mittels Spritzguß hergestellten Mikropumpen / D{\"o}pper, J. (u.a.)},
  series = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH},
  journal   = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH},
  address   = {Bremen},
  pages     = {37 -- 40},
  year      = {1996},
  language  = {en}
}
@article{Kaemper1994,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Fertigung von Mikroaktoren mittels LIGA-Technik. Lehr, H.; Abel, S.; Chritz, G.; Ehrfeld, W.; K{\"a}mper, K.-P.; Michel, F.},
  series = {Proceedings Microengineering 94 : Messe Stuttgart 17. - 19. Mai 1994 / Messe Stuttgart International},
  journal   = {Proceedings Microengineering 94 : Messe Stuttgart 17. - 19. Mai 1994 / Messe Stuttgart International},
  address   = {Stuttgart},
  pages     = {getr. Z{\"a}hlung},
  year      = {1994},
  language  = {de}
}
@article{Kaemper1996,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Mikromontage zur Fertigung hybrider Mikrosysteme. Nienhaus, M.; Berg, U.; Ehrfeld, W.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.},
  series = {41. Internationales Wissenschaftliches Kolloquium, Wandel im Maschinenbau durch Feinwerktechik und Mikrosystemtechnik, Bd. 1, Ilmenau, DE, 23.-26. Sep, 1996},
  journal   = {41. Internationales Wissenschaftliches Kolloquium, Wandel im Maschinenbau durch Feinwerktechik und Mikrosystemtechnik, Bd. 1, Ilmenau, DE, 23.-26. Sep, 1996},
  pages     = {121 -- 126},
  year      = {1996},
  language  = {de}
}
@article{Kaemper2003,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Education and Training in MST. K{\"a}mper, K.-P.; Picard, A.; Brill, M.; Cassel, D.; Jentsch, A.; Merten, S.; Rollwa, M.},
  series = {Mst-News (2003)},
  journal   = {Mst-News (2003)},
  isbn      = {0948-3128},
  pages     = {35},
  year      = {2003},
  language  = {en}
}
@misc{Kaemper2007,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Skript zur Vorlesung Mikrotechnik 1},
  year      = {2007},
  abstract  = {Kennwortgesch{\"u}tzter Zugang nur f{\"u}r Studierende bei Prof. Dr. Klaus-Peter K{\"a}mper. Sommersemester 2007. Version 2.3 vom 27.02.2007 I-8, 484 S.: Ill.; graph. Darst. Inhaltsverzeichnis: 1 Einf{\"u}hrung: Was ist Mikrotechnik? 2 Fertigung im Reinraum 3 Der Werkstoff Silizium 4 D{\"u}nnschichttechnologie 5 Photolithographie 6 {\"A}tztechnologie 7 „Bulk Micromachining" 8 „Surface Micromachining" 9 Trocken{\"a}tzen tiefer Mikrostrukturen 10 LIGA-Technik 11 Mikrofunkenerosion 12 Laser in der Mikrotechnik 13 Mechanische Mikrofertigung 14 Photostruktuierbares Glas 15 Aufbau- und Verbindungstechnik},
  subject      = {Mikrosystemtechnik},
  language  = {de}
}
@misc{Kaemper2007,
  author    = {K{\"a}mper, Klaus-Peter},
  title     = {Lecture notes Sensors and Actuators},
  year      = {2007},
  abstract  = {Kennwortgesch{\"u}tzter Zugang nur f{\"u}r Studierende bei Prof. Dr. Klaus-Peter K{\"a}mper. Wintersemester 2007/2008. Version vom 30.08.2007. 472 Seiten (pdf-Format)},
  subject      = {Sensor},
  language  = {en}
}
@article{KaemperAbrahamHopster1992,
  author    = {K{\"a}mper, Klaus-Peter and Abraham, D. L. and Hopster, H.},
  title     = {Spin-polarized electron-energy-loss spectroscopy on epitaxial fcc Co layers on Cu(001)},
  series = {Physical Review B. 45 (1992), H. 24},
  journal   = {Physical Review B. 45 (1992), H. 24},
  isbn      = {1095-3795},
  pages     = {14335 -- 14346},
  year      = {1992},
  language  = {en}
}
@article{KaemperAbrahamEhrfeldetal.1998,
  author    = {K{\"a}mper, Klaus-Peter and Abraham, M. and Ehrfeld, W. and Hessel, V.},
  title     = {Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; K{\"a}mper, K.-P.; Lacher, M.; Picard, A.},
  series = {Microelectronic Engineering. 41-42 (1998)},
  journal   = {Microelectronic Engineering. 41-42 (1998)},
  isbn      = {0167-9317},
  pages     = {47 -- 52},
  year      = {1998},
  language  = {en}
}
@article{KaemperBergBegemannetal.1998,
  author    = {K{\"a}mper, Klaus-Peter and Berg, U. and Begemann, M. and Hagemann, B. (u.a.)},
  title     = {Series production and testing of a micro motor. Serienfertigung und Pr{\"u}fung eines Mikromotors},
  series = {Actuator 98 : 6th International Conference on New Actuators ; 17 - 19 June, 1998, Bremen, Germany ; conference proceedings / ed.: Hubert Borgmann ...},
  journal   = {Actuator 98 : 6th International Conference on New Actuators ; 17 - 19 June, 1998, Bremen, Germany ; conference proceedings / ed.: Hubert Borgmann ...},
  publisher = {Messe Bremen},
  address   = {Bremen},
  isbn      = {3-933339-00-6},
  pages     = {552 -- 555},
  year      = {1998},
  language  = {en}
}
@article{KaemperBergLehretal.1996,
  author    = {K{\"a}mper, Klaus-Peter and Berg, U. and Lehr, H. and Ehrfeld, W.},
  title     = {Experimentelle Untersuchungen zur automatisierten Mikrolinsenmontage. Berg, U.; K{\"a}mper, K.-P.; Lehr, H.; Ehrfeld, W.},
  series = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart},
  journal   = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart},
  year      = {1996},
  language  = {de}
}
@article{KaemperBergWolfetal.1996,
  author    = {K{\"a}mper, Klaus-Peter and Berg, U. and Wolf, A. and Lehr, H.},
  title     = {Entwicklung von Linsenhaltern f{\"u}r ein SMIF-kompatibles Magazinsystem und deren Fertigung durch Mikrospritzguß. Berg, U.; K{\"a}mper, K.-P.; Wolf, A.; Lehr, H.; Ehrfeld, W.},
  series = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart},
  journal   = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart},
  year      = {1996},
  language  = {de}
}
@article{KaemperDoepperClemensetal.1997,
  author    = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Clemens, M. and Ehrfeld, W.},
  title     = {Micro gear pumps for dosing of viscous fluids. / D{\"o}pper, J. (u.a.)},
  series = {Journal of Micromechanics and Microengineering. 7 (1997), H. 3},
  journal   = {Journal of Micromechanics and Microengineering. 7 (1997), H. 3},
  isbn      = {0960-1317},
  pages     = {230 -- 232},
  year      = {1997},
  language  = {en}
}
@article{KaemperDoepperEhrfeldetal.1995,
  author    = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Ehrfeld, W. and Hagemann, B.},
  title     = {Simulation supported design of LIGA Microsystems. K{\"a}mper, K.-P.; D{\"o}pper, J.; Ehrfeld, W.; Hagemann, B.; Hill, S.D.J.; Lehr, H.},
  series = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey},
  journal   = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey},
  publisher = {Computational Mechanics Publ.},
  address   = {Southampton [u.a.]},
  isbn      = {1-85312-390-0},
  pages     = {3 -- 10},
  year      = {1995},
  language  = {en}
}
@article{KaemperDoepperEhrfeldetal.1995,
  author    = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Ehrfeld, W. and Hagemann, B.},
  title     = {An investigation of computer modelling for micro-injection moulding. Hill, S.D.J.; K{\"a}mper, K.-P.; Dasbach, U.; D{\"o}pper, J.; Ehrfeld, W.; Kaupert, M.},
  series = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey},
  journal   = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey},
  publisher = {Computational Mechanics Publ.},
  address   = {Southampton [u.a.]},
  isbn      = {1-85312-390-0},
  pages     = {275},
  year      = {1995},
  language  = {en}
}
@article{KaemperDoepperEhrfeldetal.1998,
  author    = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Ehrfeld, W. and Oberbeck, S.},
  title     = {A self-filling low-cost membrane micropump},
  series = {Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division},
  journal   = {Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division},
  publisher = {IEEE Service Center},
  address   = {Piscataway, NJ},
  isbn      = {078034412X},
  pages     = {432 -- 437},
  year      = {1998},
  language  = {en}
}
@article{KaemperEhrfeldDoepperetal.1997,
  author    = {K{\"a}mper, Klaus-Peter and Ehrfeld, W. and D{\"o}pper, J. and Hessel, V.},
  title     = {Microfluidic components for biological and chemical microreactors. K{\"a}mper, K.-P.; Ehrfeld, W.; D{\"o}pper, J.; Hessel, V.; Lehr, H.; L{\"o}we, H.; Richter, T.; Wolf, A.},
  series = {Proceedings : an investigation of micro structures, sensors, actuators, machines and robots ; Nagoya, Japan, January 26 - 30, 1997 / IEEE Robotics and Automation Society ...},
  journal   = {Proceedings : an investigation of micro structures, sensors, actuators, machines and robots ; Nagoya, Japan, January 26 - 30, 1997 / IEEE Robotics and Automation Society ...},
  publisher = {IEEE Service Center},
  address   = {Piscataway, NJ},
  isbn      = {0-7803-3744-1},
  pages     = {338 -- 343},
  year      = {1997},
  language  = {en}
}
@article{KaemperEhrfeldHagemannetal.1996,
  author    = {K{\"a}mper, Klaus-Peter and Ehrfeld, W. and Hagemann, B. and Lehr, H.},
  title     = {Electromagnetic permanent magnet micromotor with integrated micro gear box. K{\"a}mper, K.-P.; Ehrfeld, W.; Hagemann, B.; Lehr, H.; Michel, F.; Schirling, A.; Th{\"u}rigen, C.; Wittig, T.},
  series = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH},
  journal   = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH},
  address   = {Bremen},
  pages     = {429},
  year      = {1996},
  language  = {en}
}
@article{KaemperEhrfeldHesseletal.1997,
  author    = {K{\"a}mper, Klaus-Peter and Ehrfeld, W. and Hessel, V. and Lacher, M.},
  title     = {Market oriented development and production of microdevices. Ehrfeld, W.; Hessel, V.; K{\"a}mper, K.-P.; Lacher, M.; Picard, A.; Schmidt, M.; Schulz, C.},
  series = {Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1},
  journal   = {Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1},
  publisher = {IEEE Service Center},
  address   = {Piscataway, NJ},
  isbn      = {0-7803-3664-X},
  pages     = {71 -- 79},
  year      = {1997},
  language  = {en}
}