@article{ReisertSchneiderGeissleretal.2013, author = {Reisert, Steffen and Schneider, Benno and Geissler, Hanno and Gompel, Matthias van and Wagner, Patrick and Sch{\"o}ning, Michael Josef}, title = {Multi-sensor chip for the investigation of different types of metal oxides for the detection of H2O2 in the ppm range}, series = {physica status solidi (a)}, volume = {210}, journal = {physica status solidi (a)}, number = {5}, publisher = {Wiley}, address = {Weinheim}, issn = {1862-6319}, pages = {898 -- 904}, year = {2013}, abstract = {In this work, a multi-sensor chip for the investigation of the sensing properties of different types of metal oxides towards hydrogen peroxide in the ppm range is presented. The fabrication process and physical characterization of the multi-sensor chip are described. Pure SnO2 and WO3 as well as Pd- and Pt-doped SnO2 films are characterized in terms of their sensitivity to H2O2. The sensing films have been prepared by drop-coating of water-dispensed nano-powders. A physical characterization, including scanning electron microscopy and X-ray diffraction analysis of the deposited metal-oxide films, was done. From the measurements in hydrogen peroxide atmosphere, it could be shown, that all of the tested metal oxide films are suitable for the detection of H2O2 in the ppm range. The highest sensitivity and reproducibility was achieved using Pt-doped SnO2. Calibration plot of a SnO2, WO3, Pt-, and Pd-doped SnO2 gas sensor for H2O2 concentrations in the ppm range.}, language = {en} } @article{HuckPoghossianBaeckeretal.2015, author = {Huck, Christina and Poghossian, Arshak and B{\"a}cker, Matthias and Reisert, Steffen and Kramer, Friederike and Begoyan, Vardges K. and Buniatyan, Vahe V. and Sch{\"o}ning, Michael Josef}, title = {Multi-parameter sensing using high-k oxide of barium strontium titanate}, series = {Physica status solidi (a)}, volume = {212}, journal = {Physica status solidi (a)}, number = {6}, publisher = {Wiley}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.201431911}, pages = {1259}, year = {2015}, abstract = {High-k perovskite oxide of barium strontium titanate (BST) represents a very attractive multi-functional transducer material for the development of (bio-)chemical sensors. In this work, a Si-based sensor chip containing Pt interdigitated electrodes covered with a thin BST layer (485 nm) has been developed for multi-parameter chemical sensing. The chip has been applied for the contactless measurement of the electrolyte conductivity, the detection of adsorbed charged macromolecules (positively charged polyelectrolytes of polyethylenimine) and the concentration of hydrogen peroxide (H2O2) vapor. The experimental results of functional testing of individual sensors are presented. The mechanism of the BST sensitivity to charged polyelectrolytes and H2O2 vapor has been proposed and discussed.}, language = {en} } @article{PoghossianSchultzeSchoening2003, author = {Poghossian, Arshak and Schultze, J. W. and Sch{\"o}ning, Michael Josef}, title = {Multi-parameter detection of (bio-)chemical and physical quantities using an identical transducer principle}, series = {Sensors and Actuators B. 91 (2003), H. 1-3}, journal = {Sensors and Actuators B. 91 (2003), H. 1-3}, isbn = {0925-4005}, pages = {83 -- 91}, year = {2003}, language = {en} } @article{YoshinobuErmelenkoMourzinaetal.2003, author = {Yoshinobu, T. and Ermelenko, Y. and Mourzina, Y. and Sch{\"o}ning, Michael Josef and Iwasaki, H. and Vlasov, Y.}, title = {Multi-component analysis based on the light-addressable potentiometric sensor (LAPS)}, series = {Proceedings : 11th international conference Sensor 2003; 13 - 15 May 2003, Exhibition Centre Nuremberg, Germany}, journal = {Proceedings : 11th international conference Sensor 2003; 13 - 15 May 2003, Exhibition Centre Nuremberg, Germany}, publisher = {AMA Service}, address = {Wunstorf}, pages = {141 -- 144}, year = {2003}, language = {en} } @article{KirchnerOberlaenderSucoetal.2013, author = {Kirchner, Patrick and Oberl{\"a}nder, Jan and Suco, Henri-Pierre and Rysstad, Gunnar and Sch{\"o}ning, Michael Josef}, title = {Monitoring the microbicidal effectiveness of gaseous hydrogen peroxide in sterilisation processes by means of a calorimetric gas sensor}, series = {Food control}, volume = {31}, journal = {Food control}, number = {2}, publisher = {Elsevier}, address = {Amsterdam}, issn = {0956-7135}, doi = {10.1016/j.foodcont.2012.11.048}, pages = {530 -- 538}, year = {2013}, abstract = {In the present work, a novel method for monitoring sterilisation processes with gaseous H2O2 in combination with heat activation by means of a specially designed calorimetric gas sensor was evaluated. Therefore, the sterilisation process was extensively studied by using test specimens inoculated with Bacillus atrophaeus spores in order to identify the most influencing process factors on its microbicidal effectiveness. Besides the contact time of the test specimens with gaseous H2O2 varied between 0.2 and 0.5 s, the present H2O2 concentration in a range from 0 to 8\% v/v (volume percent) had a strong influence on the microbicidal effectiveness, whereas the change of the vaporiser temperature, gas flow and humidity were almost negligible. Furthermore, a calorimetric H2O2 gas sensor was characterised in the sterilisation process with gaseous H2O2 in a wide range of parameter settings, wherein the measurement signal has shown a linear response against the H2O2 concentration with a sensitivity of 4.75 °C/(\% v/v). In a final step, a correlation model by matching the measurement signal of the gas sensor with the microbial inactivation kinetics was established that demonstrates its suitability as an efficient method for validating the microbicidal effectiveness of sterilisation processes with gaseous H2O2.}, language = {en} } @article{SchusserKrischerBaeckeretal.2015, author = {Schusser, Sebastian and Krischer, Maximillian and B{\"a}cker, Matthias and Poghossian, Arshak and Wagner, Patrick and Sch{\"o}ning, Michael Josef}, title = {Monitoring of the Enzymatically Catalyzed Degradation of Biodegradable Polymers by Means of Capacitive Field-Effect Sensors}, series = {Analytical Chemistry}, volume = {87}, journal = {Analytical Chemistry}, number = {13}, publisher = {ACS Publications}, address = {Washington, DC}, issn = {1520-6882}, doi = {10.1021/acs.analchem.5b00617}, pages = {6607 -- 6613}, year = {2015}, abstract = {Designing novel or optimizing existing biodegradable polymers for biomedical applications requires numerous tests on the effect of substances on the degradation process. In the present work, polymer-modified electrolyte-insulator-semiconductor (PMEIS) sensors have been applied for monitoring an enzymatically catalyzed degradation of polymers for the first time. The thin films of biodegradable polymer poly(d,l-lactic acid) and enzyme lipase were used as a model system. During degradation, the sensors were read-out by means of impedance spectroscopy. In order to interpret the data obtained from impedance measurements, an electrical equivalent circuit model was developed. In addition, morphological investigations of the polymer surface have been performed by means of in situ atomic force microscopy. The sensor signal change, which reflects the progress of degradation, indicates an accelerated degradation in the presence of the enzyme compared to hydrolysis in neutral pH buffer media. The degradation rate increases with increasing enzyme concentration. The obtained results demonstrate the potential of PMEIS sensors as a very promising tool for in situ and real-time monitoring of degradation of polymers.}, language = {en} } @article{BohrnStuetzFuchsetal.2012, author = {Bohrn, U. and St{\"u}tz, E. and Fuchs, K. and Fleischer, M. and Sch{\"o}ning, Michael Josef and Wagner, P.}, title = {Monitoring of irritant gas using a whole-cell-based sensor system}, series = {Sensors and Actuators B: Chemical}, volume = {175}, journal = {Sensors and Actuators B: Chemical}, publisher = {Elsevier}, address = {Amsterdam}, issn = {0925-4005}, doi = {10.1016/j.snb.2012.05.088}, pages = {208 -- 217}, year = {2012}, abstract = {Cell-based sensors for the detection of gases have long been underrepresented, due to the cellular requirement of being cultured in a liquid environment. In this work we established a cell-based gas biosensor for the detection of toxic substances in air, by adapting a commercial sensor chip (Bionas®), previously used for the measurement of pollutants in liquids. Cells of the respiratory tract (A549, RPMI 2650, V79), which survive at a gas phase in a natural context, are used as biological receptors. The physiological cell parameters acidification, respiration and morphology are continuously monitored in parallel. Ammonia was used as a highly water-soluble model gas to test the feasibility of the sensor system. Infrared measurements confirmed the sufficiency of the medium draining method. This sensor system provides a basis for many sensor applications such as environmental monitoring, building technology and public security.}, language = {en} } @article{GasparyanVitusevichOffenhaeusseretal.2011, author = {Gasparyan, F.V. and Vitusevich, S.A. and Offenh{\"a}usser, A. and Sch{\"o}ning, Michael Josef}, title = {Modified charge fluctuation noise model for electrolyte-insulator-semiconductor devices}, series = {Modern Physics Letters B (MPLB). 25 (2011), H. 11}, journal = {Modern Physics Letters B (MPLB). 25 (2011), H. 11}, publisher = {World Scientific Publ.}, address = {Singapur}, isbn = {0217-9849}, pages = {831 -- 840}, year = {2011}, language = {en} } @article{SchoeningBussLuethetal.1999, author = {Sch{\"o}ning, Michael Josef and Buß, G. and L{\"u}th, H. and Schultze, J.W.}, title = {Modifications and characterization of a silicon-based microelectrode array}, series = {Electrochimica Acta. 44 (1999), H. 21-22}, journal = {Electrochimica Acta. 44 (1999), H. 21-22}, isbn = {0013-4686}, pages = {3899 -- 3910}, year = {1999}, language = {en} } @article{MolinnusIkenJohnenetal.2022, author = {Molinnus, Denise and Iken, Heiko and Johnen, Anna Lynn and Richstein, Benjamin and Hellmich, Lena and Poghossian, Arshak and Knoch, Joachim and Sch{\"o}ning, Michael Josef}, title = {Miniaturized pH-Sensitive Field-Effect Capacitors with Ultrathin Ta₂O₅ Films Prepared by Atomic Layer Deposition}, series = {physica status solidi (a) applications and materials science}, volume = {219}, journal = {physica status solidi (a) applications and materials science}, number = {8}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.202100660}, pages = {7 Seiten}, year = {2022}, abstract = {Miniaturized electrolyte-insulator-semiconductor capacitors (EISCAPs) with ultrathin gate insulators have been studied in terms of their pH-sensitive sensor characteristics: three different EISCAP systems consisting of Al-p-Si-Ta2O5(5 nm), Al-p-Si-Si3N4(1 or 2 nm)-Ta2O5 (5 nm), and Al-p-Si-SiO2(3.6 nm)-Ta2O5(5 nm) layer structures are characterized in buffer solution with different pH values by means of capacitance-voltage and constant capacitance method. The SiO2 and Si3N4 gate insulators are deposited by rapid thermal oxidation and rapid thermal nitridation, respectively, whereas the Ta2O5 film is prepared by atomic layer deposition. All EISCAP systems have a clear pH response, favoring the stacked gate insulators SiO2-Ta2O5 when considering the overall sensor characteristics, while the Si3N4(1 nm)-Ta2O5 stack delivers the largest accumulation capacitance (due to the lower equivalent oxide thickness) and a higher steepness in the slope of the capacitance-voltage curve among the studied stacked gate insulator systems.}, language = {en} } @article{SchoeningNaetherAugeretal.2004, author = {Sch{\"o}ning, Michael Josef and N{\"a}ther, Niko and Auger, V. and Poghossian, Arshak and Koudelka-Hep, M.}, title = {Miniaturized flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and Su-8 technologies}, series = {Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors}, journal = {Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors}, publisher = {Japan Association of Chemical Sensors}, address = {Fukuoka}, pages = {554 -- 555}, year = {2004}, language = {en} } @article{MiyamotoKanekoMatsuoetal.2010, author = {Miyamoto, Ko-ichiro and Kaneko, Kazumi and Matsuo, Akira and Wagner, Torsten and Kanoh, Shin`ichiro and Sch{\"o}ning, Michael Josef and Yoshinobu, Tatsuo}, title = {Miniaturized chemical imaging sensor system using an OLED display panel}, series = {Procedia Engineering. 5 (2010)}, journal = {Procedia Engineering. 5 (2010)}, isbn = {1877-7058}, pages = {516 -- 519}, year = {2010}, language = {en} } @article{MiyamotoKanekoMatsuoetal.2012, author = {Miyamoto, Ko-ichiro and Kaneko, Kazumi and Matsuo, Akira and Wagner, Torsten and Kanoh, Shin{\´i}chiro and Sch{\"o}ning, Michael Josef and Yoshinobu, Tatsuo}, title = {Miniaturized chemical imaging sensor system using an OLED display panel}, series = {Sensors and Actuators B: Chemical}, volume = {170}, journal = {Sensors and Actuators B: Chemical}, publisher = {Elsevier}, address = {Amsterdam}, issn = {0925-4005}, doi = {10.1016/j.snb.2011.02.029}, pages = {82 -- 87}, year = {2012}, abstract = {The chemical imaging sensor is a semiconductor-based chemical sensor that can visualize the two-dimensional distribution of specific ions or molecules in the solution. In this study, we developed a miniaturized chemical imaging sensor system with an OLED display panel as a light source that scans the sensor plate. In the proposed configuration, the display panel is placed directly below the sensor plate and illuminates the back surface. The measured area defined by illumination can be arbitrarily customized to fit the size and the shape of the sample to be measured. The waveform of the generated photocurrent, the current-voltage characteristics and the pH sensitivity were investigated and pH imaging with this miniaturized system was demonstrated.}, language = {en} } @article{SchoeningRonkelCrottetal.1997, author = {Sch{\"o}ning, Michael Josef and Ronkel, F. and Crott, M. and Thust, M. (u.a.)}, title = {Miniaturization of potentiometric sensors using porous silicon microtechnology}, series = {Electrochimica Acta. 42 (1997), H. 22}, journal = {Electrochimica Acta. 42 (1997), H. 22}, isbn = {0013-4686}, pages = {3185 -- 3193}, year = {1997}, language = {en} } @article{SimonisDawgulLuethetal.2005, author = {Simonis, A. and Dawgul, M. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef}, title = {Miniaturised reference electrodes for field-effect sensors compatible to silicon chip technology}, series = {Electrochimica Acta. 51 (2005), H. 5}, journal = {Electrochimica Acta. 51 (2005), H. 5}, isbn = {0013-4686}, doi = {10.1016/j.electacta.2005.04.063}, pages = {930 -- 937}, year = {2005}, language = {en} } @article{SchoeningNaetherAugeretal.2005, author = {Sch{\"o}ning, Michael Josef and N{\"a}ther, Niko and Auger, V. and Poghossian, Arshak and Koudelka-Hep, M.}, title = {Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies}, series = {Sensors and Actuators B. 108 (2005), H. 1-2}, journal = {Sensors and Actuators B. 108 (2005), H. 1-2}, isbn = {0925-4005}, pages = {986 -- 992}, year = {2005}, language = {en} } @article{PoghossianIngebrandtYeungetal.2004, author = {Poghossian, Arshak and Ingebrandt, S. and Yeung, C.-K. and Offenh{\"a}usser, A. and Sch{\"o}ning, Michael Josef}, title = {Microsensors based on ion-sensitive field-effect transistors for biomedical applications}, series = {Biomedizinische Technik. 49 (2004), H. 2}, journal = {Biomedizinische Technik. 49 (2004), H. 2}, isbn = {0932-4666}, pages = {1036 -- 1037}, year = {2004}, language = {en} } @article{MoritzYoshinobuFingeretal.2004, author = {Moritz, W. and Yoshinobu, T. and Finger, F. and Krause, S. and Xu, M. and Sch{\"o}ning, Michael Josef}, title = {Microscopy of impedance and surface ion concentrations}, series = {Biomedizinische Technik. 49 (2004), H. 2}, journal = {Biomedizinische Technik. 49 (2004), H. 2}, isbn = {0932-4666}, pages = {1000 -- 1001}, year = {2004}, language = {en} } @article{LeinhosSchusserBaeckeretal.2014, author = {Leinhos, Marcel and Schusser, Sebastian and B{\"a}cker, Matthias and Poghossian, Arshak and Sch{\"o}ning, Michael Josef}, title = {Micromachined multi-parameter sensor chip for the control of polymer-degradation medium}, series = {Physica Status Solidi (A) : special issue on engineering and functional interfaces}, volume = {211}, journal = {Physica Status Solidi (A) : special issue on engineering and functional interfaces}, number = {6}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1521-396X (E-Journal); 1862-6319 (E-Journal); 0031-8965 (Print); 1862-6300 (Print)}, doi = {10.1002/pssa.201330364}, pages = {1346 -- 1351}, year = {2014}, abstract = {It is well known that the degradation environment can strongly influence the biodegradability and kinetics of biodegradation processes of polymers. Therefore, besides the monitoring of the degradation process, it is also necessary to control the medium in which the degradation takes place. In this work, a micromachined multi-parameter sensor chip for the control of the polymer-degradation medium has been developed. The chip combines a capacitive field-effect pH sensor, a four-electrode electrolyte-conductivity sensor and a thin-film Pt-temperature sensor. The results of characterization of individual sensors are presented. In addition, the multi-parameter sensor chip together with an impedimetric polymer-degradation sensor was simultaneously characterized in degradation solutions with different pH and electrolyte conductivity. The obtained results demonstrate the feasibility of the multi-parameter sensor chip for the control of the polymer-degradation medium.}, language = {en} } @article{WagnerMiyamotoShigiharaetal.2011, author = {Wagner, Torsten and Miyamoto, Ko-ichiro and Shigihara, Noriko and Sch{\"o}ning, Michael Josef and Yoshinobu, Tatsuo}, title = {Microfluidic systems with free definable sensor spots by an integrated light-addressable potentiometric sensor}, series = {Procedia Engineering. 25 (2011)}, journal = {Procedia Engineering. 25 (2011)}, publisher = {Elsevier}, address = {Amsterdam}, isbn = {1877-7058}, pages = {791 -- 794}, year = {2011}, language = {en} }