@article{KurowskiSchultzeLuethetal.2001, author = {Kurowski, A. and Schultze, J.W. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef}, title = {Micro- and nanopatterning of sensor chips by means of macroporous silicon}, series = {Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany. Ernst Obermeier (Ed.)}, journal = {Transducers '01 Eurosensors XV : digest of technical papers / the 11th International Conference on Solid-State Sensors and Actuators, June 10-14, 2001, Munich, Germany. Ernst Obermeier (Ed.)}, publisher = {Springer}, address = {Berlin [u.a.]}, isbn = {3-540-42150-5}, pages = {640 -- 643}, year = {2001}, language = {en} } @article{SchoeningKurowskiThustetal.2000, author = {Sch{\"o}ning, Michael Josef and Kurowski, A. and Thust, M. and Kordos, P. and Schultze, J. W. and L{\"u}th, H.}, title = {Capacitive microsensors for biochemical sensing on porous silicon technology}, series = {Sensors and Actuators B. 64 (2000), H. 1-3}, journal = {Sensors and Actuators B. 64 (2000), H. 1-3}, isbn = {0925-4005}, pages = {59 -- 64}, year = {2000}, language = {en} } @article{KurowskiSchultzeLuethetal.2002, author = {Kurowski, A. and Schultze, J. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef}, title = {Micro- and nanopatterning of sensor chips by means of macroporous silicon.}, series = {Sensors and Actuators B. 83 (2002), H. 1-3}, journal = {Sensors and Actuators B. 83 (2002), H. 1-3}, isbn = {0925-4005}, pages = {123 -- 128}, year = {2002}, language = {en} }