@article{KaemperPicardBrilletal.2002, author = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlef (u.a.)}, title = {Neue Medien f{\"u}r die praktische MST Ausbildung}, series = {Rundschau, FH Kaiserslautern,. Ausgabe Ju (2002)}, journal = {Rundschau, FH Kaiserslautern,. Ausgabe Ju (2002)}, pages = {14 -- 15}, year = {2002}, language = {de} } @article{Kaemper2002, author = {K{\"a}mper, Klaus-Peter}, title = {Die Mikroaktorik wird erwachsen}, series = {INNO : innovative Technik - neue Anwendungen / Hrsg.: IVAM Fachverband f{\"u}r Mikrotechnik, Dortmund. Ausgabe 22 (2002)}, journal = {INNO : innovative Technik - neue Anwendungen / Hrsg.: IVAM Fachverband f{\"u}r Mikrotechnik, Dortmund. Ausgabe 22 (2002)}, pages = {4 -- 5}, year = {2002}, language = {de} } @article{KaemperMertenBrilletal.2003, author = {K{\"a}mper, Klaus-Peter and Merten, Sabine and Brill, Manfred and Picard, Antoni (u.a.)}, title = {Vom virtuellen Wafer zum realen Drucksensor: Information - Communication - Knowledge engineering education today}, series = {Schriftenreihe Ingenieurp{\"a}dagogik : Hochschule f{\"u}r Bildungswissenschaften in Klagenfurt ; Band 49}, journal = {Schriftenreihe Ingenieurp{\"a}dagogik : Hochschule f{\"u}r Bildungswissenschaften in Klagenfurt ; Band 49}, pages = {318 -- 321}, year = {2003}, language = {de} } @article{KaemperPicardBrilletal.2003, author = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlef (u.a.)}, title = {The Virtual Cleanroom - a new tool in teaching MST process technologies}, series = {mst news International newsletter on micro - nano Integration (2003)}, journal = {mst news International newsletter on micro - nano Integration (2003)}, isbn = {0948-3128}, pages = {35 -- 36}, year = {2003}, language = {en} } @article{KaemperBergBegemannetal.1998, author = {K{\"a}mper, Klaus-Peter and Berg, U. and Begemann, M. and Hagemann, B. (u.a.)}, title = {Series production and testing of a micro motor. Serienfertigung und Pr{\"u}fung eines Mikromotors}, series = {Actuator 98 : 6th International Conference on New Actuators ; 17 - 19 June, 1998, Bremen, Germany ; conference proceedings / ed.: Hubert Borgmann ...}, journal = {Actuator 98 : 6th International Conference on New Actuators ; 17 - 19 June, 1998, Bremen, Germany ; conference proceedings / ed.: Hubert Borgmann ...}, publisher = {Messe Bremen}, address = {Bremen}, isbn = {3-933339-00-6}, pages = {552 -- 555}, year = {1998}, language = {en} } @article{KaemperDoepperClemensetal.1997, author = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Clemens, M. and Ehrfeld, W.}, title = {Micro gear pumps for dosing of viscous fluids. / D{\"o}pper, J. (u.a.)}, series = {Journal of Micromechanics and Microengineering. 7 (1997), H. 3}, journal = {Journal of Micromechanics and Microengineering. 7 (1997), H. 3}, isbn = {0960-1317}, pages = {230 -- 232}, year = {1997}, language = {en} } @article{KaemperLehrAbeletal.1996, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Abel, S. and D{\"o}pper, J.}, title = {Microactuators as driving units for microrobotic systems. Herstellung von Mikroaktoren mit dem LIGA-Verfahren f{\"u}r Mikroroboter / Lehr, H.; Abel, S.; D{\"o}pper, J.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Schulu, c.; Th{\"u}rigen, C.}, series = {Proceedings of the SPIE - The International Society for Optical Engineering}, journal = {Proceedings of the SPIE - The International Society for Optical Engineering}, isbn = {0277-786X}, pages = {202 -- 210}, year = {1996}, language = {en} } @article{Kaemper1996, author = {K{\"a}mper, Klaus-Peter}, title = {Development of low-cost injection moulded micropumps. Entwicklung von kosteng{\"u}nstigen, mittels Spritzguß hergestellten Mikropumpen / D{\"o}pper, J. (u.a.)}, series = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, journal = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, address = {Bremen}, pages = {37 -- 40}, year = {1996}, language = {en} } @article{KaemperMertenBrilletal.2003, author = {K{\"a}mper, Klaus-Peter and Merten, Sabine and Brill, Manfred and Picard, Antoni (u.a.)}, title = {Vom virtuellen Wafer zum realen Drucksensor: Bildungsnetzwerke verbessern die Ausbildung in Hochtechnologien.}, series = {Kooperation und Arbeit in vernetzten Welten : Tagungsband der GFA-Herbstkonferenz 2003, Aachen, 29. September - 01. Oktober 2003 / Holger Luczak (Hrsg.)}, journal = {Kooperation und Arbeit in vernetzten Welten : Tagungsband der GFA-Herbstkonferenz 2003, Aachen, 29. September - 01. Oktober 2003 / Holger Luczak (Hrsg.)}, publisher = {Ergonomia-Verl.}, address = {Stuttgart}, isbn = {3-935089-71-6}, pages = {238 -- 241}, year = {2003}, language = {de} } @article{KaemperMertenBrilletal.2003, author = {K{\"a}mper, Klaus-Peter and Merten, Sabine and Brill, Manfred and Cassel, Detlev (u.a.)}, title = {Virtuelle Sensor-Fertigung: Hightech mit LabVIEW}, series = {Virtuelle Instrumente in der Praxis : Messtechnik, Automatisierung ; Begleitband zum Kongress VIP 2003 / Rahman Jamal ; Hans Jaschinski (Hrsg.)}, journal = {Virtuelle Instrumente in der Praxis : Messtechnik, Automatisierung ; Begleitband zum Kongress VIP 2003 / Rahman Jamal ; Hans Jaschinski (Hrsg.)}, publisher = {H{\"u}thig}, address = {Heidelberg}, isbn = {3-7785-2908-0}, pages = {465 -- 470}, year = {2003}, language = {de} } @article{KaemperKurzawaSchmittetal.1986, author = {K{\"a}mper, Klaus-Peter and Kurzawa, R. and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Spin-resolved photoemission study of in situ grown epitaxial Fe layers on W(110). Kurzawa, R.; K{\"a}mper, K.-P.; Schmitt, W.; G{\"u}ntherodt, G.}, series = {Solid State Communications. 60 (1986), H. 10}, journal = {Solid State Communications. 60 (1986), H. 10}, isbn = {0038-1098}, pages = {777 -- 780}, year = {1986}, language = {en} } @misc{Kaemper2008, author = {K{\"a}mper, Klaus-Peter}, title = {Lecture notes Sensors and Actuators WS 2008/2009}, year = {2008}, abstract = {Password necessarily. Access only for Students by Prof. Dr. Klaus-Peter K{\"a}mper. Winter semester 2008/2009. 488 pages (pdf) Contents 1. Introduction 2. Introduction to Sensors 3. Introduction to Microfabrication 4. Pressure Sensors 5. Acceleration Sensors 6. Angular Rate Sensors 7. Position Sensors 8. Flow Sensors 9. Piezoelectric Actuators 10. Magnetostrictive Actuators 11. Actuators based on Shape Memory Alloys 12. Actuators based on Electrorheological Fluids 13. Actuators based on Magnetorheological Fluids 14. Index}, subject = {Sensor}, language = {en} } @misc{Kaemper2007, author = {K{\"a}mper, Klaus-Peter}, title = {Lecture notes Sensors and Actuators}, year = {2007}, abstract = {Kennwortgesch{\"u}tzter Zugang nur f{\"u}r Studierende bei Prof. Dr. Klaus-Peter K{\"a}mper. Wintersemester 2007/2008. Version vom 30.08.2007. 472 Seiten (pdf-Format)}, subject = {Sensor}, language = {en} } @inproceedings{MertenConradKaemperetal.2006, author = {Merten, Sabine and Conrad, Thorsten and K{\"a}mper, Klaus-Peter and Picard, Antoni and Sch{\"u}tze, Andreas}, title = {Virtual Technology Labs - an efficient tool for the preparation of hands-on-MEMS-courses in training foundries}, year = {2006}, abstract = {Hands-on-training in high technology areas is usually limited due to the high cost for lab infrastructure and equipment. One specific example is the field of MEMS, where investment and upkeep of clean rooms with microtechnology equipment is either financed by production or R\&D projects greatly reducing the availability for education purposes. For efficient hands-on-courses a MEMS training foundry, currently used jointly by six higher education institutions, was established at FH Kaiserslautern. In a typical one week course, students manufacture a micromachined pressure sensor including all lithography, thin film and packaging steps. This compact and yet complete program is only possible because participants learn to use the different complex machines in advance via a Virtual Training Lab (VTL). In this paper we present the concept of the MEMS training foundry and the VTL preparation together with results from a scientific evaluation of the VTL over the last three years.}, subject = {Virtuelles Laboratorium}, language = {en} } @misc{Kaemper2007, author = {K{\"a}mper, Klaus-Peter}, title = {Skript zur Vorlesung Mikrotechnik 1}, year = {2007}, abstract = {Kennwortgesch{\"u}tzter Zugang nur f{\"u}r Studierende bei Prof. Dr. Klaus-Peter K{\"a}mper. Sommersemester 2007. Version 2.3 vom 27.02.2007 I-8, 484 S.: Ill.; graph. Darst. Inhaltsverzeichnis: 1 Einf{\"u}hrung: Was ist Mikrotechnik? 2 Fertigung im Reinraum 3 Der Werkstoff Silizium 4 D{\"u}nnschichttechnologie 5 Photolithographie 6 {\"A}tztechnologie 7 „Bulk Micromachining" 8 „Surface Micromachining" 9 Trocken{\"a}tzen tiefer Mikrostrukturen 10 LIGA-Technik 11 Mikrofunkenerosion 12 Laser in der Mikrotechnik 13 Mechanische Mikrofertigung 14 Photostruktuierbares Glas 15 Aufbau- und Verbindungstechnik}, subject = {Mikrosystemtechnik}, language = {de} } @article{KaemperPicardBrilletal.2003, author = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlev and Jentsch, Andreas and Merten, Sabine and Rollwa, Markus}, title = {The Virtual Clean Room - a new tool in teaching MST process technologies}, year = {2003}, abstract = {The Virtual Clean Room - a new tool in teaching MST process technologies University education in high-technology fields like MST is not complete without intensive laboratory sessions. Students cannot fully grasp the complexity and the special problems related to the manufacturing of microsystems without a thorough hands-on experience in a MST clean room.}, subject = {Virtuelle Maschine}, language = {en} } @inproceedings{MertenKaemperBrilletal.2003, author = {Merten, Sabine and K{\"a}mper, Klaus-Peter and Brill, Manfred and Picard, Antoni and Cassel, Detlev and Jentsch, Andreas and Rollwa, Markus}, title = {Virtuelle Sensor-Fertigung: Hightech mit LabVIEW}, year = {2003}, abstract = {Eine neue Generation von Praktika an Hochschulen w{\"a}chst heran. Moderne Wege beim Verstehen und Erlernen naturwissenschaftlicher Zusammenh{\"a}nge sowie industrieller Fertigungsprozesse sind gefordert. Das Technologiepraktikum „Virtuelle Sensor- Fertigung", entwickelt im Verbundprojekt INGMEDIA an den Fachhochschulen Aachen und Zweibr{\"u}cken, tr{\"a}gt als neuartiges Lern- und Lehrmodul dieser Forderung Rechnung. Die Studierenden lernen einen vollst{\"a}ndigen Fertigungsprozess mit Hilfe von virtuellen, in LabVIEW programmierten Maschinen kennen, bevor sie die reale Prozesskette im Reinraum durchf{\"u}hren.}, subject = {LabVIEW}, language = {de} }