@article{KaemperPicardBrilletal.2003,
  author    = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlev and Jentsch, Andreas and Merten, Sabine and Rollwa, Markus},
  title     = {The Virtual Clean Room - a new tool in teaching MST process technologies},
  year      = {2003},
  abstract  = {The Virtual Clean Room - a new tool in teaching MST process technologies University education in high-technology fields like MST is not complete without intensive laboratory sessions. Students cannot fully grasp the complexity and the special problems related to the manufacturing of microsystems without a thorough hands-on experience in a MST clean room.},
  subject      = {Virtuelle Maschine},
  language  = {en}
}
@article{PicardBrillCasseletal.2002,
  author    = {Picard, Antoni and Brill, Manfred and Cassel, Detlev and Jentsch, Andreas and Rollwa, Markus and K{\"a}mper, Klaus-Peter and Merten, Sabine},
  title     = {Neue Medien f{\"u}r die praktische MST-Ausbildung},
  organization    = {FH-Kaiserslautern},
  year      = {2002},
  abstract  = {Im Studiengang Mikrosystemtechnik des Fachhochschulstandortes Zweibr{\"u}cken werden zwei neue moderne Anlagen f{\"u}r die Herstellung von mikrotechnischen Komponenten in Betrieb genommen: Ein Oxidationsofen f{\"u}r Herstellung d{\"u}nner Oxidschichten auf Silizium-Einkristallen und eine Belichtungsapparatur f{\"u}r die Fotolithografie - das Besondere an diesen Anlagen: Sie existieren nur virtuell, d.h. als Animationen in einer Computerwelt.},
  subject      = {Mikrosystemtechnik},
  language  = {de}
}