@inproceedings{PlatenPoghossianSchoening2006,
  author    = {Platen, Johannes and Poghossian, Arshak and Sch{\"o}ning, Michael Josef},
  title     = {Microstructured Nanostructures - nanostructuring by means of conventional photolithography and layer-expansion technique},
  url       = {http://nbn-resolving.de/urn:nbn:de:hbz:a96-opus-1477},
  year      = {2006},
  abstract  = {A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, "fluidic-channel"-, "cantilever"- and meander-type structures.},
  subject      = {Biosensor},
  language  = {en}
}
@inproceedings{PoghossianSchumacherKloocketal.2006,
  author    = {Poghossian, Arshak and Schumacher, Kerstin and Kloock, Joachim P. and Rosenkranz, Christian and Schultze, Joachim W. and M{\"u}ller-Veggian, Mattea and Sch{\"o}ning, Michael Josef},
  title     = {Functional testing and characterisation of ISFETs on wafer level by means of a micro-droplet cell},
  url       = {http://nbn-resolving.de/urn:nbn:de:hbz:a96-opus-1259},
  year      = {2006},
  abstract  = {A wafer-level functionality testing and characterisation system for ISFETs (ionsensitive field-effect transistor) is realised by means of integration of a specifically designed capillary electrochemical micro-droplet cell into a commercial wafer prober-station. The developed system allows the identification and selection of "good" ISFETs at the earliest stage and to avoid expensive bonding, encapsulation and packaging processes for nonfunctioning ISFETs and thus, to decrease costs, which are wasted for bad dies. The developed system is also feasible for wafer-level characterisation of ISFETs in terms of sensitivity, hysteresis and response time. Additionally, the system might be also utilised for wafer-level testing of further electrochemical sensors.},
  subject      = {Biosensor},
  language  = {en}
}