@article{SchoeningSimonisRugeetal.2002,
  author    = {Sch{\"o}ning, Michael Josef and Simonis, Anette and Ruge, Christian and Ecken, Holger and M{\"u}ller-Veggian, Mattea and L{\"u}th, Hans},
  title     = {A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer},
  series = {Sensors. 2 (2002), H. 1},
  journal   = {Sensors. 2 (2002), H. 1},
  isbn      = {1424-8220},
  doi       = {10.3390/s20100011},
  pages     = {11 -- 22},
  year      = {2002},
  abstract  = {Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.},
  language  = {en}
}
@article{ErmelenkoYoshinobuMourzinaetal.2002,
  author    = {Ermelenko, Y. and Yoshinobu, T. and Mourzina, Y. and Furuichi, K. and Levichev, S. and Vlasov, Y. and Sch{\"o}ning, Michael Josef and Iwasaki, H.},
  title     = {Lithium sensor based on the laser scanning semiconductor transducer},
  series = {Analytica Chimica Acta. 459 (2002), H. 1},
  journal   = {Analytica Chimica Acta. 459 (2002), H. 1},
  issn      = {0378-4304},
  pages     = {1 -- 9},
  year      = {2002},
  language  = {en}
}
@article{SchoeningPoghossianSchultzeetal.2002,
  author    = {Sch{\"o}ning, Michael Josef and Poghossian, Arshak and Schultze, J. W. and L{\"u}th, H.},
  title     = {Field-effect based multifunctional hybrid sensor module for the determination of both (bio-)chemical and physical paramters},
  series = {Proceedings of SPIE. 4576 (2002)},
  journal   = {Proceedings of SPIE. 4576 (2002)},
  pages     = {149 -- 159},
  year      = {2002},
  language  = {en}
}
@article{KurowskiSchultzeLuethetal.2002,
  author    = {Kurowski, A. and Schultze, J. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef},
  title     = {Micro- and nanopatterning of sensor chips by means of macroporous silicon.},
  series = {Sensors and Actuators B. 83 (2002), H. 1-3},
  journal   = {Sensors and Actuators B. 83 (2002), H. 1-3},
  isbn      = {0925-4005},
  pages     = {123 -- 128},
  year      = {2002},
  language  = {en}
}
@article{ErmelenkoYoshinobuMourzinaetal.2002,
  author    = {Ermelenko, Y. and Yoshinobu, T and Mourzina, Y. and Levichev, S. and Furuichi, K. and Vlasov, Y. and Sch{\"o}ning, Michael Josef and Iwasaki, H.},
  title     = {Photocurable membranes for ion-selective light-addressable potentiometric sensors},
  series = {Sensors and Actuators B. 85 (2002), H. 1-2},
  journal   = {Sensors and Actuators B. 85 (2002), H. 1-2},
  isbn      = {0925-4005},
  pages     = {79 -- 85},
  year      = {2002},
  language  = {en}
}
@article{VlasovMourzinaLeginetal.2002,
  author    = {Vlasov, Y. G. and Mourzina, Y. G. and Legin, A. V. and Ermelenko, Y. E. and Schubert, J. and Sch{\"o}ning, Michael Josef and L{\"u}th, H.},
  title     = {Solid-state thin film sensors based on chalcogenide materials prepared by planar technology and pulsed laser deposition},
  series = {Russian Journal of Applied Chemistry. 75 (2002), H. 3},
  journal   = {Russian Journal of Applied Chemistry. 75 (2002), H. 3},
  isbn      = {1070-4272},
  pages     = {351 -- 356},
  year      = {2002},
  language  = {en}
}
@article{SchoeningWangKrauseetal.2002,
  author    = {Sch{\"o}ning, Michael Josef and Wang, Josepf and Krause, Robin and Block, Kirstin and Musameh, Mustafa and Mulchandani, Ashok and Mulchandani, Priti and Chen, Wilfred},
  title     = {Dual amperometric-potentiometric biosensor detection system for monitoring organophosphorus neurotoxins},
  series = {Analyica Chimica Acta. 469 (2002), H. 2},
  journal   = {Analyica Chimica Acta. 469 (2002), H. 2},
  isbn      = {0378-4304},
  pages     = {197 -- 203},
  year      = {2002},
  language  = {en}
}
@article{SchoeningKloockMourzinaetal.2002,
  author    = {Sch{\"o}ning, Michael Josef and Kloock, Joachim P. and Mourzina, Y. and Schubert, J.},
  title     = {A first step towards a microfabricated thin-film sensor array on the basis of chalcogenide glass materials},
  series = {Sensors. 2 (2002), H. 9},
  journal   = {Sensors. 2 (2002), H. 9},
  isbn      = {1424-8220},
  pages     = {356 -- 365},
  year      = {2002},
  language  = {en}
}
@article{SchoeningSimonisKringsetal.2002,
  author    = {Sch{\"o}ning, Michael Josef and Simonis, A. and Krings, T. and L{\"u}th, H. and Wang, J.},
  title     = {Evaluation of a chip-based thin-film / thick-film sensor hybrid for (bio-)chemical analysis},
  series = {Electroanalysis},
  volume    = {14},
  journal   = {Electroanalysis},
  number    = {13},
  issn      = {1040-0397},
  pages     = {955 -- 958},
  year      = {2002},
  language  = {en}
}
@article{SchoeningPoghossian2002,
  author    = {Sch{\"o}ning, Michael Josef and Poghossian, Arshak},
  title     = {Recent advances in biologically sensitive field-effect transistors (BioFETs)},
  series = {Analyst. 127 (2002)},
  journal   = {Analyst. 127 (2002)},
  isbn      = {0003-2654},
  pages     = {1137 -- 1151},
  year      = {2002},
  language  = {en}
}