@article{SchoeningThustSteffenetal.1998, author = {Sch{\"o}ning, Michael Josef and Thust, M. and Steffen, A. and M{\"u}ller-Veggian, Mattea}, title = {Kapazitives Sensorarray in Siliziumtechnik f{\"u}r die Prozeß{\"u}berwachung}, series = {ITG-Fachbericht. 148 (1998)}, journal = {ITG-Fachbericht. 148 (1998)}, isbn = {0341-0196}, pages = {257 -- 263}, year = {1998}, language = {de} } @article{SchoeningThustSteffenetal.1996, author = {Sch{\"o}ning, Michael Josef and Thust, M. and Steffen, A. and Kordos, P. and L{\"u}th, H. and Kauffmann, F. and Hoffmann, B.}, title = {Halbleiter-Biosensoren f{\"u}r den Penicillin-Nachweis in w{\"a}ßrigen L{\"o}sungen}, series = {Gesellschaft Mess- und Automatisierungstechnik: Sensoren und Messysteme : Tagung Bad Nauheim, 11. bis 13. M{\"a}rz 1996 / VDI/VDE-Gesellschaft Meß- und Automatisierungstechnik.}, journal = {Gesellschaft Mess- und Automatisierungstechnik: Sensoren und Messysteme : Tagung Bad Nauheim, 11. bis 13. M{\"a}rz 1996 / VDI/VDE-Gesellschaft Meß- und Automatisierungstechnik.}, publisher = {VDI-Verl.}, address = {D{\"u}sseldorf}, isbn = {3-18-091255-3}, pages = {143 -- 148}, year = {1996}, language = {de} } @article{SchoeningThustMuellerVeggianetal.1998, author = {Sch{\"o}ning, Michael Josef and Thust, M. and M{\"u}ller-Veggian, Mattea and Kordos, P.}, title = {A novel silicon-based sensor array with capacitive EIS structures}, series = {Sensors and Actuators B. 47 (1998), H. 1-3}, journal = {Sensors and Actuators B. 47 (1998), H. 1-3}, isbn = {0925-4005}, pages = {225 -- 230}, year = {1998}, language = {en} } @article{SchoeningThustKordosetal.2000, author = {Sch{\"o}ning, Michael Josef and Thust, M. and Kordos, P. and Schultze, J.W. and L{\"u}th, H.}, title = {Capacitive microsensors for biochemical sensing based on porous silicon technology}, series = {Transducers '99 : proceedings of the Tenth International Conference on Solid-State Sensors and Actuators ; 7 - 10 June, 1999, Sendai, Japan / ed.: S. Middelhoek}, journal = {Transducers '99 : proceedings of the Tenth International Conference on Solid-State Sensors and Actuators ; 7 - 10 June, 1999, Sendai, Japan / ed.: S. Middelhoek}, publisher = {Elsevier}, address = {Amsterdam [u.a.]}, pages = {1184 -- 1187}, year = {2000}, language = {en} } @article{SchoeningThustKordosetal.1998, author = {Sch{\"o}ning, Michael Josef and Thust, M. and Kordos, P. and L{\"u}th, H. and Ronkel, F. and Schultze, J. W.}, title = {Halbleiter-Schichtstrukturen mit por{\"o}sem Silizium als Chemo- und Biosensoren}, series = {ITG-Fachbericht. 148 (1998)}, journal = {ITG-Fachbericht. 148 (1998)}, isbn = {0341-0196}, pages = {33 -- 40}, year = {1998}, language = {de} } @article{SchoeningThustKordosetal.1999, author = {Sch{\"o}ning, Michael Josef and Thust, M. and Kordos, P. and L{\"u}th, H.}, title = {Chemical sensing structures - From EIS capacitors to array-type sensors}, series = {Solid state chemical and biochemical sensors : proceedings of Topical Symposium 9 - "Solid State Chemical and Biochemical Sensors" of the Forum on New Materials of the 9th CIMTEC-World Ceramics Congress and Forum on New Materials Florence, Italy June 14-1}, journal = {Solid state chemical and biochemical sensors : proceedings of Topical Symposium 9 - "Solid State Chemical and Biochemical Sensors" of the Forum on New Materials of the 9th CIMTEC-World Ceramics Congress and Forum on New Materials Florence, Italy June 14-1}, publisher = {Techna}, address = {Faenza}, isbn = {88-86538-27-8}, pages = {55 -- 62}, year = {1999}, language = {en} } @article{SchoeningThust2003, author = {Sch{\"o}ning, Michael Josef and Thust, M.}, title = {Die „Zukunftswerkstatt Biosensorik" - ein Netzwerk f{\"u}r Lehre, Forschungs und Wirtschaft}, series = {Fachblatt Fachhochschule Aachen (2003)}, journal = {Fachblatt Fachhochschule Aachen (2003)}, isbn = {1430-7707}, pages = {6 -- 7}, year = {2003}, language = {de} } @article{SchoeningThust1996, author = {Sch{\"o}ning, Michael Josef and Thust, M.}, title = {Miniaturisierbare Halbleitersensoren f{\"u}r die Penicillinbestimmung in der Biotechnologie}, series = {MessTec. 3 (1996)}, journal = {MessTec. 3 (1996)}, isbn = {0947-4234}, pages = {82 -- 85}, year = {1996}, language = {de} } @article{SchoeningSteffenSankeetal.1995, author = {Sch{\"o}ning, Michael Josef and Steffen, A. and Sanke, M. S. and M{\"u}ller-Veggian, Mattea}, title = {Kapazitiver Silizium-Sensor als Ph-Transducer f{\"u}r Biosensoranwendungen}, series = {13. Jahrestagung der Biotechnologen : Wiesbaden 30.05. - 01.06.1995 / Deutsche Gesellschaft f{\"u}r Chemisches Apparatewesen, Chemische Technik und Biotechnologie e.V., Frankfurt am Main. - Bd. 1}, journal = {13. Jahrestagung der Biotechnologen : Wiesbaden 30.05. - 01.06.1995 / Deutsche Gesellschaft f{\"u}r Chemisches Apparatewesen, Chemische Technik und Biotechnologie e.V., Frankfurt am Main. - Bd. 1}, publisher = {DECHEMA}, address = {Frankfurt am Main}, pages = {65 -- 66}, year = {1995}, language = {de} } @article{SchoeningSimonisRugeetal.2002, author = {Sch{\"o}ning, Michael Josef and Simonis, Anette and Ruge, Christian and Ecken, Holger and M{\"u}ller-Veggian, Mattea and L{\"u}th, Hans}, title = {A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer}, series = {Sensors. 2 (2002), H. 1}, journal = {Sensors. 2 (2002), H. 1}, isbn = {1424-8220}, doi = {10.3390/s20100011}, pages = {11 -- 22}, year = {2002}, abstract = {Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.}, language = {en} }