@article{GasparyanVitusevichOffenhaeusseretal.2011,
  author    = {Gasparyan, F.V. and Vitusevich, S.A. and Offenh{\"a}usser, A. and Sch{\"o}ning, Michael Josef},
  title     = {Modified charge fluctuation noise model for electrolyte-insulator-semiconductor devices},
  series = {Modern Physics Letters B (MPLB). 25 (2011), H. 11},
  journal   = {Modern Physics Letters B (MPLB). 25 (2011), H. 11},
  publisher = {World Scientific Publ.},
  address   = {Singapur},
  isbn      = {0217-9849},
  pages     = {831 -- 840},
  year      = {2011},
  language  = {en}
}
@article{SchoeningBussLuethetal.1999,
  author    = {Sch{\"o}ning, Michael Josef and Buß, G. and L{\"u}th, H. and Schultze, J.W.},
  title     = {Modifications and characterization of a silicon-based microelectrode array},
  series = {Electrochimica Acta. 44 (1999), H. 21-22},
  journal   = {Electrochimica Acta. 44 (1999), H. 21-22},
  isbn      = {0013-4686},
  pages     = {3899 -- 3910},
  year      = {1999},
  language  = {en}
}
@article{MolinnusIkenJohnenetal.2022,
  author    = {Molinnus, Denise and Iken, Heiko and Johnen, Anna Lynn and Richstein, Benjamin and Hellmich, Lena and Poghossian, Arshak and Knoch, Joachim and Sch{\"o}ning, Michael Josef},
  title     = {Miniaturized pH-Sensitive Field-Effect Capacitors with Ultrathin Ta₂O₅ Films Prepared by Atomic Layer Deposition},
  series = {physica status solidi (a) applications and materials science},
  volume    = {219},
  journal   = {physica status solidi (a) applications and materials science},
  number    = {8},
  publisher = {Wiley-VCH},
  address   = {Weinheim},
  issn      = {1862-6319},
  doi       = {10.1002/pssa.202100660},
  pages     = {7 Seiten},
  year      = {2022},
  abstract  = {Miniaturized electrolyte-insulator-semiconductor capacitors (EISCAPs) with ultrathin gate insulators have been studied in terms of their pH-sensitive sensor characteristics: three different EISCAP systems consisting of Al-p-Si-Ta2O5(5 nm), Al-p-Si-Si3N4(1 or 2 nm)-Ta2O5 (5 nm), and Al-p-Si-SiO2(3.6 nm)-Ta2O5(5 nm) layer structures are characterized in buffer solution with different pH values by means of capacitance-voltage and constant capacitance method. The SiO2 and Si3N4 gate insulators are deposited by rapid thermal oxidation and rapid thermal nitridation, respectively, whereas the Ta2O5 film is prepared by atomic layer deposition. All EISCAP systems have a clear pH response, favoring the stacked gate insulators SiO2-Ta2O5 when considering the overall sensor characteristics, while the Si3N4(1 nm)-Ta2O5 stack delivers the largest accumulation capacitance (due to the lower equivalent oxide thickness) and a higher steepness in the slope of the capacitance-voltage curve among the studied stacked gate insulator systems.},
  language  = {en}
}
@article{SchoeningNaetherAugeretal.2004,
  author    = {Sch{\"o}ning, Michael Josef and N{\"a}ther, Niko and Auger, V. and Poghossian, Arshak and Koudelka-Hep, M.},
  title     = {Miniaturized flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and Su-8 technologies},
  series = {Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors},
  journal   = {Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors},
  publisher = {Japan Association of Chemical Sensors},
  address   = {Fukuoka},
  pages     = {554 -- 555},
  year      = {2004},
  language  = {en}
}
@article{MiyamotoKanekoMatsuoetal.2010,
  author    = {Miyamoto, Ko-ichiro and Kaneko, Kazumi and Matsuo, Akira and Wagner, Torsten and Kanoh, Shin`ichiro and Sch{\"o}ning, Michael Josef and Yoshinobu, Tatsuo},
  title     = {Miniaturized chemical imaging sensor system using an OLED display panel},
  series = {Procedia Engineering. 5 (2010)},
  journal   = {Procedia Engineering. 5 (2010)},
  isbn      = {1877-7058},
  pages     = {516 -- 519},
  year      = {2010},
  language  = {en}
}
@article{MiyamotoKanekoMatsuoetal.2012,
  author    = {Miyamoto, Ko-ichiro and Kaneko, Kazumi and Matsuo, Akira and Wagner, Torsten and Kanoh, Shin{\´i}chiro and Sch{\"o}ning, Michael Josef and Yoshinobu, Tatsuo},
  title     = {Miniaturized chemical imaging sensor system using an OLED display panel},
  series = {Sensors and Actuators B: Chemical},
  volume    = {170},
  journal   = {Sensors and Actuators B: Chemical},
  publisher = {Elsevier},
  address   = {Amsterdam},
  issn      = {0925-4005},
  doi       = {10.1016/j.snb.2011.02.029},
  pages     = {82 -- 87},
  year      = {2012},
  abstract  = {The chemical imaging sensor is a semiconductor-based chemical sensor that can visualize the two-dimensional distribution of specific ions or molecules in the solution. In this study, we developed a miniaturized chemical imaging sensor system with an OLED display panel as a light source that scans the sensor plate. In the proposed configuration, the display panel is placed directly below the sensor plate and illuminates the back surface. The measured area defined by illumination can be arbitrarily customized to fit the size and the shape of the sample to be measured. The waveform of the generated photocurrent, the current-voltage characteristics and the pH sensitivity were investigated and pH imaging with this miniaturized system was demonstrated.},
  language  = {en}
}
@article{SchoeningRonkelCrottetal.1997,
  author    = {Sch{\"o}ning, Michael Josef and Ronkel, F. and Crott, M. and Thust, M. (u.a.)},
  title     = {Miniaturization of potentiometric sensors using porous silicon microtechnology},
  series = {Electrochimica Acta. 42 (1997), H. 22},
  journal   = {Electrochimica Acta. 42 (1997), H. 22},
  isbn      = {0013-4686},
  pages     = {3185 -- 3193},
  year      = {1997},
  language  = {en}
}
@article{SimonisLuethWangetal.2004,
  author    = {Simonis, A. and L{\"u}th, H. and Wang, J. and Sch{\"o}ning, Michael Josef},
  title     = {Miniaturisierte Referenzelektroden in Siliziumtechnologie f{\"u}r elektrochemische Sensoranwendungen},
  series = {Sensoren und Messsysteme 2004 : Tagung Ludwigsburg, 15. und 16. M{\"a}rz 2004 / VDI-VDE-Gesellschaft Mess- und Automatisierungstechnik},
  journal   = {Sensoren und Messsysteme 2004 : Tagung Ludwigsburg, 15. und 16. M{\"a}rz 2004 / VDI-VDE-Gesellschaft Mess- und Automatisierungstechnik},
  publisher = {VDI},
  address   = {D{\"u}sseldorf},
  isbn      = {3-18-091829-2},
  pages     = {847 -- 850},
  year      = {2004},
  language  = {de}
}
@article{SchoeningThust1996,
  author    = {Sch{\"o}ning, Michael Josef and Thust, M.},
  title     = {Miniaturisierbare Halbleitersensoren f{\"u}r die Penicillinbestimmung in der Biotechnologie},
  series = {MessTec. 3 (1996)},
  journal   = {MessTec. 3 (1996)},
  isbn      = {0947-4234},
  pages     = {82 -- 85},
  year      = {1996},
  language  = {de}
}
@article{SimonisDawgulLuethetal.2005,
  author    = {Simonis, A. and Dawgul, M. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef},
  title     = {Miniaturised reference electrodes for field-effect sensors compatible to silicon chip technology},
  series = {Electrochimica Acta. 51 (2005), H. 5},
  journal   = {Electrochimica Acta. 51 (2005), H. 5},
  isbn      = {0013-4686},
  doi       = {10.1016/j.electacta.2005.04.063},
  pages     = {930 -- 937},
  year      = {2005},
  language  = {en}
}