@article{GasparyanVitusevichOffenhaeusseretal.2011, author = {Gasparyan, F.V. and Vitusevich, S.A. and Offenh{\"a}usser, A. and Sch{\"o}ning, Michael Josef}, title = {Modified charge fluctuation noise model for electrolyte-insulator-semiconductor devices}, series = {Modern Physics Letters B (MPLB). 25 (2011), H. 11}, journal = {Modern Physics Letters B (MPLB). 25 (2011), H. 11}, publisher = {World Scientific Publ.}, address = {Singapur}, isbn = {0217-9849}, pages = {831 -- 840}, year = {2011}, language = {en} } @article{SchoeningBussLuethetal.1999, author = {Sch{\"o}ning, Michael Josef and Buß, G. and L{\"u}th, H. and Schultze, J.W.}, title = {Modifications and characterization of a silicon-based microelectrode array}, series = {Electrochimica Acta. 44 (1999), H. 21-22}, journal = {Electrochimica Acta. 44 (1999), H. 21-22}, isbn = {0013-4686}, pages = {3899 -- 3910}, year = {1999}, language = {en} } @article{MolinnusIkenJohnenetal.2022, author = {Molinnus, Denise and Iken, Heiko and Johnen, Anna Lynn and Richstein, Benjamin and Hellmich, Lena and Poghossian, Arshak and Knoch, Joachim and Sch{\"o}ning, Michael Josef}, title = {Miniaturized pH-Sensitive Field-Effect Capacitors with Ultrathin Ta₂O₅ Films Prepared by Atomic Layer Deposition}, series = {physica status solidi (a) applications and materials science}, volume = {219}, journal = {physica status solidi (a) applications and materials science}, number = {8}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.202100660}, pages = {7 Seiten}, year = {2022}, abstract = {Miniaturized electrolyte-insulator-semiconductor capacitors (EISCAPs) with ultrathin gate insulators have been studied in terms of their pH-sensitive sensor characteristics: three different EISCAP systems consisting of Al-p-Si-Ta2O5(5 nm), Al-p-Si-Si3N4(1 or 2 nm)-Ta2O5 (5 nm), and Al-p-Si-SiO2(3.6 nm)-Ta2O5(5 nm) layer structures are characterized in buffer solution with different pH values by means of capacitance-voltage and constant capacitance method. The SiO2 and Si3N4 gate insulators are deposited by rapid thermal oxidation and rapid thermal nitridation, respectively, whereas the Ta2O5 film is prepared by atomic layer deposition. All EISCAP systems have a clear pH response, favoring the stacked gate insulators SiO2-Ta2O5 when considering the overall sensor characteristics, while the Si3N4(1 nm)-Ta2O5 stack delivers the largest accumulation capacitance (due to the lower equivalent oxide thickness) and a higher steepness in the slope of the capacitance-voltage curve among the studied stacked gate insulator systems.}, language = {en} } @article{SchoeningNaetherAugeretal.2004, author = {Sch{\"o}ning, Michael Josef and N{\"a}ther, Niko and Auger, V. and Poghossian, Arshak and Koudelka-Hep, M.}, title = {Miniaturized flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and Su-8 technologies}, series = {Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors}, journal = {Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors}, publisher = {Japan Association of Chemical Sensors}, address = {Fukuoka}, pages = {554 -- 555}, year = {2004}, language = {en} } @article{MiyamotoKanekoMatsuoetal.2010, author = {Miyamoto, Ko-ichiro and Kaneko, Kazumi and Matsuo, Akira and Wagner, Torsten and Kanoh, Shin`ichiro and Sch{\"o}ning, Michael Josef and Yoshinobu, Tatsuo}, title = {Miniaturized chemical imaging sensor system using an OLED display panel}, series = {Procedia Engineering. 5 (2010)}, journal = {Procedia Engineering. 5 (2010)}, isbn = {1877-7058}, pages = {516 -- 519}, year = {2010}, language = {en} } @article{MiyamotoKanekoMatsuoetal.2012, author = {Miyamoto, Ko-ichiro and Kaneko, Kazumi and Matsuo, Akira and Wagner, Torsten and Kanoh, Shin{\´i}chiro and Sch{\"o}ning, Michael Josef and Yoshinobu, Tatsuo}, title = {Miniaturized chemical imaging sensor system using an OLED display panel}, series = {Sensors and Actuators B: Chemical}, volume = {170}, journal = {Sensors and Actuators B: Chemical}, publisher = {Elsevier}, address = {Amsterdam}, issn = {0925-4005}, doi = {10.1016/j.snb.2011.02.029}, pages = {82 -- 87}, year = {2012}, abstract = {The chemical imaging sensor is a semiconductor-based chemical sensor that can visualize the two-dimensional distribution of specific ions or molecules in the solution. In this study, we developed a miniaturized chemical imaging sensor system with an OLED display panel as a light source that scans the sensor plate. In the proposed configuration, the display panel is placed directly below the sensor plate and illuminates the back surface. The measured area defined by illumination can be arbitrarily customized to fit the size and the shape of the sample to be measured. The waveform of the generated photocurrent, the current-voltage characteristics and the pH sensitivity were investigated and pH imaging with this miniaturized system was demonstrated.}, language = {en} } @article{SchoeningRonkelCrottetal.1997, author = {Sch{\"o}ning, Michael Josef and Ronkel, F. and Crott, M. and Thust, M. (u.a.)}, title = {Miniaturization of potentiometric sensors using porous silicon microtechnology}, series = {Electrochimica Acta. 42 (1997), H. 22}, journal = {Electrochimica Acta. 42 (1997), H. 22}, isbn = {0013-4686}, pages = {3185 -- 3193}, year = {1997}, language = {en} } @article{SimonisLuethWangetal.2004, author = {Simonis, A. and L{\"u}th, H. and Wang, J. and Sch{\"o}ning, Michael Josef}, title = {Miniaturisierte Referenzelektroden in Siliziumtechnologie f{\"u}r elektrochemische Sensoranwendungen}, series = {Sensoren und Messsysteme 2004 : Tagung Ludwigsburg, 15. und 16. M{\"a}rz 2004 / VDI-VDE-Gesellschaft Mess- und Automatisierungstechnik}, journal = {Sensoren und Messsysteme 2004 : Tagung Ludwigsburg, 15. und 16. M{\"a}rz 2004 / VDI-VDE-Gesellschaft Mess- und Automatisierungstechnik}, publisher = {VDI}, address = {D{\"u}sseldorf}, isbn = {3-18-091829-2}, pages = {847 -- 850}, year = {2004}, language = {de} } @article{SchoeningThust1996, author = {Sch{\"o}ning, Michael Josef and Thust, M.}, title = {Miniaturisierbare Halbleitersensoren f{\"u}r die Penicillinbestimmung in der Biotechnologie}, series = {MessTec. 3 (1996)}, journal = {MessTec. 3 (1996)}, isbn = {0947-4234}, pages = {82 -- 85}, year = {1996}, language = {de} } @article{SimonisDawgulLuethetal.2005, author = {Simonis, A. and Dawgul, M. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef}, title = {Miniaturised reference electrodes for field-effect sensors compatible to silicon chip technology}, series = {Electrochimica Acta. 51 (2005), H. 5}, journal = {Electrochimica Acta. 51 (2005), H. 5}, isbn = {0013-4686}, doi = {10.1016/j.electacta.2005.04.063}, pages = {930 -- 937}, year = {2005}, language = {en} } @article{SchoeningNaetherAugeretal.2005, author = {Sch{\"o}ning, Michael Josef and N{\"a}ther, Niko and Auger, V. and Poghossian, Arshak and Koudelka-Hep, M.}, title = {Miniaturised flow-through cell with integrated capacitive EIS sensor fabricated at wafer level using Si and SU-8 technologies}, series = {Sensors and Actuators B. 108 (2005), H. 1-2}, journal = {Sensors and Actuators B. 108 (2005), H. 1-2}, isbn = {0925-4005}, pages = {986 -- 992}, year = {2005}, language = {en} } @article{PoghossianIngebrandtYeungetal.2004, author = {Poghossian, Arshak and Ingebrandt, S. and Yeung, C.-K. and Offenh{\"a}usser, A. and Sch{\"o}ning, Michael Josef}, title = {Microsensors based on ion-sensitive field-effect transistors for biomedical applications}, series = {Biomedizinische Technik. 49 (2004), H. 2}, journal = {Biomedizinische Technik. 49 (2004), H. 2}, isbn = {0932-4666}, pages = {1036 -- 1037}, year = {2004}, language = {en} } @article{MoritzYoshinobuFingeretal.2004, author = {Moritz, W. and Yoshinobu, T. and Finger, F. and Krause, S. and Xu, M. and Sch{\"o}ning, Michael Josef}, title = {Microscopy of impedance and surface ion concentrations}, series = {Biomedizinische Technik. 49 (2004), H. 2}, journal = {Biomedizinische Technik. 49 (2004), H. 2}, isbn = {0932-4666}, pages = {1000 -- 1001}, year = {2004}, language = {en} } @article{LeinhosSchusserBaeckeretal.2014, author = {Leinhos, Marcel and Schusser, Sebastian and B{\"a}cker, Matthias and Poghossian, Arshak and Sch{\"o}ning, Michael Josef}, title = {Micromachined multi-parameter sensor chip for the control of polymer-degradation medium}, series = {Physica Status Solidi (A) : special issue on engineering and functional interfaces}, volume = {211}, journal = {Physica Status Solidi (A) : special issue on engineering and functional interfaces}, number = {6}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1521-396X (E-Journal); 1862-6319 (E-Journal); 0031-8965 (Print); 1862-6300 (Print)}, doi = {10.1002/pssa.201330364}, pages = {1346 -- 1351}, year = {2014}, abstract = {It is well known that the degradation environment can strongly influence the biodegradability and kinetics of biodegradation processes of polymers. Therefore, besides the monitoring of the degradation process, it is also necessary to control the medium in which the degradation takes place. In this work, a micromachined multi-parameter sensor chip for the control of the polymer-degradation medium has been developed. The chip combines a capacitive field-effect pH sensor, a four-electrode electrolyte-conductivity sensor and a thin-film Pt-temperature sensor. The results of characterization of individual sensors are presented. In addition, the multi-parameter sensor chip together with an impedimetric polymer-degradation sensor was simultaneously characterized in degradation solutions with different pH and electrolyte conductivity. The obtained results demonstrate the feasibility of the multi-parameter sensor chip for the control of the polymer-degradation medium.}, language = {en} } @article{WagnerMiyamotoShigiharaetal.2011, author = {Wagner, Torsten and Miyamoto, Ko-ichiro and Shigihara, Noriko and Sch{\"o}ning, Michael Josef and Yoshinobu, Tatsuo}, title = {Microfluidic systems with free definable sensor spots by an integrated light-addressable potentiometric sensor}, series = {Procedia Engineering. 25 (2011)}, journal = {Procedia Engineering. 25 (2011)}, publisher = {Elsevier}, address = {Amsterdam}, isbn = {1877-7058}, pages = {791 -- 794}, year = {2011}, language = {en} } @article{BaeckerRaueSchusseretal.2012, author = {B{\"a}cker, Matthias and Raue, Markus and Schusser, Sebastian and Jeitner, C. and Breuer, L. and Wagner, P. and Poghossian, Arshak and F{\"o}rster, Arnold and Mang, Thomas and Sch{\"o}ning, Michael Josef}, title = {Microfluidic chip with integrated microvalves based on temperature- and pH-responsive hydrogel thin films}, series = {Physica Status Solidi (a)}, volume = {209}, journal = {Physica Status Solidi (a)}, number = {5}, publisher = {Wiley-VCH}, address = {Weinheim}, issn = {1862-6319}, doi = {10.1002/pssa.201100763}, pages = {839 -- 845}, year = {2012}, abstract = {Two types of microvalves based on temperature-responsive poly(N-isopropylacrylamide) (PNIPAAm) and pH-responsive poly(sodium acrylate) (PSA) hydrogel films have been developed and tested. The PNIPAAm and PSA hydrogel films were prepared by means of in situ photopolymerization directly inside the fluidic channel of a microfluidic chip fabricated by combining Si and SU-8 technologies. The swelling/shrinking properties and height changes of the PNIPAAm and PSA films inside the fluidic channel were studied at temperatures of deionized water from 14 to 36 °C and different pH values (pH 3-12) of Titrisol buffer, respectively. Additionally, in separate experiments, the lower critical solution temperature (LCST) of the PNIPAAm hydrogel was investigated by means of a differential scanning calorimetry (DSC) and a surface plasmon resonance (SPR) method. Mass-flow measurements have shown the feasibility of the prepared hydrogel films to work as an on-chip integrated temperature- or pH-responsive microvalve capable to switch the flow channel on/off.}, language = {en} } @article{AridaMohsenSchoening2009, author = {Arida, Hassan and Mohsen, Q. and Sch{\"o}ning, Michael Josef}, title = {Microfabrication, characterization and analytical application of a new thin-film silver microsensor}, series = {Electrochimica Acta. 54 (2009), H. 13}, journal = {Electrochimica Acta. 54 (2009), H. 13}, isbn = {0013-4686}, pages = {3543 -- 3547}, year = {2009}, language = {en} } @article{SchoeningLueth2002, author = {Sch{\"o}ning, Michael Josef and L{\"u}th, H.}, title = {Microfabricated semiconductor structures - Advances in (bio-)chemical sensing}, series = {Coupling of biological and electronic systems : proceedings of the 2nd Caesarium, Bonn, November 1 - 3, 2000 / Karl-Heinz Hoffmann, ed.}, journal = {Coupling of biological and electronic systems : proceedings of the 2nd Caesarium, Bonn, November 1 - 3, 2000 / Karl-Heinz Hoffmann, ed.}, publisher = {Springer}, address = {Berlin [u.a.]}, isbn = {3-540-43699-5}, pages = {79 -- 92}, year = {2002}, language = {en} } @article{Schoening2001, author = {Sch{\"o}ning, Michael Josef}, title = {Microelectronics contacts (bio-)chemistry - Semiconductor-based sensors}, series = {Biologi Italiani. 8 (2001)}, journal = {Biologi Italiani. 8 (2001)}, isbn = {0392-2510}, pages = {5 -- 10}, year = {2001}, language = {en} } @article{SchoeningGlueckSchrothetal.1999, author = {Sch{\"o}ning, Michael Josef and Gl{\"u}ck, O. and Schroth, P. and Sch{\"u}tz, S. (u.a.)}, title = {Microelectrodes, capacitors and BioFETs: Novel trends in silicon-based biochemical sensing}, series = {Biocybernetics and Biomedical Engineering. 19 (1999), H. 1}, journal = {Biocybernetics and Biomedical Engineering. 19 (1999), H. 1}, issn = {0208-5216}, pages = {105 -- 126}, year = {1999}, language = {en} }