@article{Prume2007,
  author    = {Prume, Klaus},
  title     = {Electrical and electromechanical characterization of piezoelectric thin films in view of MEMS application / Tiedke, S. ; Prume, K. ; Schmitz-Kempen, T.;},
  pages     = {702},
  year      = {2007},
  language  = {en}
}