@article{SchmittSchultzeFassbenderetal.1999, author = {Schmitt, G. and Schultze, J.-W. and Faßbender, F. and Buß, G. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef}, title = {Passivation and corrosion of microelectrode arrays}, series = {Electrochimica Acta. 44 (1999), H. 21-22}, journal = {Electrochimica Acta. 44 (1999), H. 21-22}, isbn = {0013-4686}, pages = {3865 -- 3883}, year = {1999}, language = {en} } @article{SchoeningBussLuethetal.1999, author = {Sch{\"o}ning, Michael Josef and Buß, G. and L{\"u}th, H. and Schultze, J.W.}, title = {Modifications and characterization of a silicon-based microelectrode array}, series = {Electrochimica Acta. 44 (1999), H. 21-22}, journal = {Electrochimica Acta. 44 (1999), H. 21-22}, isbn = {0013-4686}, pages = {3899 -- 3910}, year = {1999}, language = {en} } @article{PoghossianThustSchrothetal.2001, author = {Poghossian, Arshak and Thust, M. and Schroth, P. and Steffen, A. and L{\"u}th, H. and Sch{\"o}ning, Michael Josef}, title = {Penicillin detection by means of silicon-based field-effect structures}, series = {Sensors and Materials. 13 (2001), H. 4}, journal = {Sensors and Materials. 13 (2001), H. 4}, isbn = {0392-2510}, pages = {207 -- 223}, year = {2001}, language = {en} } @article{SchoeningSimonisRugeetal.2002, author = {Sch{\"o}ning, Michael Josef and Simonis, Anette and Ruge, Christian and Ecken, Holger and M{\"u}ller-Veggian, Mattea and L{\"u}th, Hans}, title = {A (bio-)chemical Field-effect Sensor with Macroporous Si as Substrate Material and a SiO₂ / LPCVD-Si₃N₄ Double Layer as pH Transducer}, series = {Sensors. 2 (2002), H. 1}, journal = {Sensors. 2 (2002), H. 1}, isbn = {1424-8220}, doi = {10.3390/s20100011}, pages = {11 -- 22}, year = {2002}, abstract = {Macroporous silicon has been etched from n-type Si, using a vertical etching cell where no rear side contact on the silicon wafer is necessary. The resulting macropores have been characterised by means of Scanning Electron Microscopy (SEM). After etching, SiO₂ was thermally grown on the top of the porous silicon as an insulating layer and Si₃N₄ was deposited by means of Low Pressure Chemical Vapour Deposition (LPCVD) as transducer material to fabricate a capacitive pH sensor. In order to prepare porous biosensors, the enzyme penicillinase has been additionally immobilised inside the porous structure. Electrochemical measurements of the pH sensor and the biosensor with an Electrolyte/Insulator/Semiconductor (EIS) structure have been performed in the Capacitance/Voltage (C/V) and Constant capacitance (ConCap) mode.}, language = {en} } @article{SimonisKringsLuethetal.2001, author = {Simonis, A. and Krings, T. and L{\"u}th, H. and Wang, J. and Sch{\"o}ning, Michael Josef}, title = {A „hybrid" thin-film pH sensor with integrated thick-film reference}, series = {Sensors. 1 (2001), H. 6}, journal = {Sensors. 1 (2001), H. 6}, isbn = {1424-8220}, pages = {183 -- 192}, year = {2001}, language = {en} } @article{Schoening2001, author = {Sch{\"o}ning, Michael Josef}, title = {Microelectronics contacts (bio-)chemistry - Semiconductor-based sensors}, series = {Biologi Italiani. 8 (2001)}, journal = {Biologi Italiani. 8 (2001)}, isbn = {0392-2510}, pages = {5 -- 10}, year = {2001}, language = {en} } @article{SchoeningSaukeSteffenetal.1995, author = {Sch{\"o}ning, Michael Josef and Sauke, M. and Steffen, A. and Marso, M. (u.a.)}, title = {Ion-sensitive field-effect transistors with ultrathin Langmuir-Blodgett membranes}, series = {Sensors and Actuators B. 27 (1995), H. 1-3}, journal = {Sensors and Actuators B. 27 (1995), H. 1-3}, isbn = {0925-4005}, pages = {325 -- 328}, year = {1995}, language = {en} } @article{SchoeningBrunsHoffmannetal.1993, author = {Sch{\"o}ning, Michael Josef and Bruns, M. and Hoffmann, W. and Hoffmann, B. (u.a.)}, title = {Iodide ion-sensitive field-effect structures}, series = {Sensors and Actuators B. 15 (1993), H. 1-3}, journal = {Sensors and Actuators B. 15 (1993), H. 1-3}, isbn = {0925-4005}, pages = {192 -- 194}, year = {1993}, language = {en} } @article{SchoeningSchuetzSchrothetal.1998, author = {Sch{\"o}ning, Michael Josef and Sch{\"u}tz, S. and Schroth, P. and Weißbecker, B. and Steffen, A. and Kordos, P. and Hummel, Hans E.}, title = {A BioFET on the basis of intact insect antennae}, series = {Sensors and Actuators B. 47 (1998), H. 1-3}, journal = {Sensors and Actuators B. 47 (1998), H. 1-3}, isbn = {0925-4005}, pages = {235 -- 238}, year = {1998}, language = {en} } @article{SchoeningThustMuellerVeggianetal.1998, author = {Sch{\"o}ning, Michael Josef and Thust, M. and M{\"u}ller-Veggian, Mattea and Kordos, P.}, title = {A novel silicon-based sensor array with capacitive EIS structures}, series = {Sensors and Actuators B. 47 (1998), H. 1-3}, journal = {Sensors and Actuators B. 47 (1998), H. 1-3}, isbn = {0925-4005}, pages = {225 -- 230}, year = {1998}, language = {en} } @article{SchoeningTsarouchasSchaubetal.1996, author = {Sch{\"o}ning, Michael Josef and Tsarouchas, D. and Schaub, A. and Beckers, L. (u.a.)}, title = {A highly long-term stable silicon-based pH sensor using pulsed laser deposition technique}, series = {Sensors and Actuators B. 35 (1996), H. 1-3}, journal = {Sensors and Actuators B. 35 (1996), H. 1-3}, isbn = {0925-4005}, pages = {228 -- 233}, year = {1996}, language = {en} } @article{SchoeningKurowskiThustetal.2000, author = {Sch{\"o}ning, Michael Josef and Kurowski, A. and Thust, M. and Kordos, P. and Schultze, J. W. and L{\"u}th, H.}, title = {Capacitive microsensors for biochemical sensing on porous silicon technology}, series = {Sensors and Actuators B. 64 (2000), H. 1-3}, journal = {Sensors and Actuators B. 64 (2000), H. 1-3}, isbn = {0925-4005}, pages = {59 -- 64}, year = {2000}, language = {en} } @article{SchoeningMalkocThustetal.2000, author = {Sch{\"o}ning, Michael Josef and Malkoc, {\"U}. and Thust, M. and Steffen, A. and Kordos, P. and L{\"u}th, H.}, title = {Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors}, series = {Sensors and Actuators B. 65 (2000), H. 1-3}, journal = {Sensors and Actuators B. 65 (2000), H. 1-3}, isbn = {0925-4005}, pages = {288 -- 290}, year = {2000}, language = {en} } @article{SchuetzSchoeningSchrothetal.2000, author = {Sch{\"u}tz, S. and Sch{\"o}ning, Michael Josef and Schroth, P. and Weißbecker, B. and Kordos, P. and L{\"u}th, H. and Hummel, Hans E.}, title = {An insectbased BioFET as a bioelectronic nose}, series = {Sensors and Actuators B. 65 (2000), H. 1-3}, journal = {Sensors and Actuators B. 65 (2000), H. 1-3}, isbn = {0925-4005}, pages = {291 -- 295}, year = {2000}, language = {en} } @article{SchoeningBussFassbenderetal.2000, author = {Sch{\"o}ning, Michael Josef and Buß, G. and Faßbender, F. and Gl{\"u}ck, O. and Schmitt, G. and Schultze, J. W. and L{\"u}th, H.}, title = {A silicon-based microelectrode array for chemical analysis}, series = {Sensors and Actuators B. 65 (2000), H. 1-3}, journal = {Sensors and Actuators B. 65 (2000), H. 1-3}, isbn = {0925-4005}, pages = {284 -- 287}, year = {2000}, language = {en} } @article{MourzinaSchoeningSchubertetal.2000, author = {Mourzina, Y.G. and Sch{\"o}ning, Michael Josef and Schubert, J. and Zander, W. and Legin, A. V. and Vlasov, Y. G. and Kordos, P. and L{\"u}th, H.}, title = {A new thin film Pb microsensor based on chalcogenide glasses}, series = {Sensors and Actuators B. 71 (2000), H. 1-2}, journal = {Sensors and Actuators B. 71 (2000), H. 1-2}, isbn = {0925-4005}, pages = {13 -- 18}, year = {2000}, language = {en} } @article{FassbenderSchmittSchoeningetal.2000, author = {Faßbender, F. and Schmitt, G. and Sch{\"o}ning, Michael Josef and L{\"u}th, H. and Buß, G. and Schultze, J. W.}, title = {Optimization of passivation layers for corrosion protection of silicon-based microelectrode arrays}, series = {Sensors and Actuators B. 68 (2000), H. 1-3}, journal = {Sensors and Actuators B. 68 (2000), H. 1-3}, isbn = {0925-4005}, pages = {128 -- 133}, year = {2000}, language = {en} } @article{IsmailHaradaYoshinobuetal.2000, author = {Ismail, A.B.M. and Harada, T. and Yoshinobu, T. and Iwasaki, H. and Sch{\"o}ning, Michael Josef and L{\"u}th, H.}, title = {Investigation of pulsed laser-deposited Al2O3 as a high pH-sensitive layer for LAPS-based biosensing applications}, series = {Sensors and Actuators B. 71 (2000), H. 3}, journal = {Sensors and Actuators B. 71 (2000), H. 3}, isbn = {0925-4005}, pages = {169 -- 172}, year = {2000}, language = {en} } @article{SchoeningSchmidtSchubertetal.2000, author = {Sch{\"o}ning, Michael Josef and Schmidt, C. and Schubert, J. and Zander, W. and Mesters, S. and Kordos, P. and L{\"u}th, H. and Legin, A. and Seleznev, B. and Vlasov, Y. G.}, title = {Thin film sensors on the basis of chalcogenide glass materials prepared by pulsed laser deposition technique}, series = {Sensors and Actuators B. 68 (2000), H. 1-3}, journal = {Sensors and Actuators B. 68 (2000), H. 1-3}, isbn = {0925-4005}, pages = {254 -- 259}, year = {2000}, language = {en} } @article{PoghossianSchoeningSchrothetal.2001, author = {Poghossian, Arshak and Sch{\"o}ning, Michael Josef and Schroth, P. and Simonis, A. and L{\"u}th, H.}, title = {An ISFET-based penicillin sensor with high sensitivity, low detection limit and long lifetime}, series = {Sensors and Actuators B. 76 (2001), H. 1-3}, journal = {Sensors and Actuators B. 76 (2001), H. 1-3}, isbn = {0925-4005}, pages = {519 -- 526}, year = {2001}, language = {en} }