@inproceedings{PlatenPoghossianSchoening2006,
  author    = {Platen, Johannes and Poghossian, Arshak and Sch{\"o}ning, Michael Josef},
  title     = {Microstructured Nanostructures - nanostructuring by means of conventional photolithography and layer-expansion technique},
  url       = {http://nbn-resolving.de/urn:nbn:de:hbz:a96-opus-1477},
  year      = {2006},
  abstract  = {A new and simple method for nanostructuring using conventional photolithography and layer expansion or pattern-size reduction technique is presented, which can further be applied for the fabrication of different nanostructures and nano-devices. The method is based on the conversion of a photolithographically patterned metal layer to a metal-oxide mask with improved pattern-size resolution using thermal oxidation. With this technique, the pattern size can be scaled down to several nanometer dimensions. The proposed method is experimentally demonstrated by preparing nanostructures with different configurations and layouts, like circles, rectangles, trapezoids, "fluidic-channel"-, "cantilever"- and meander-type structures.},
  subject      = {Biosensor},
  language  = {en}
}
@inproceedings{PoghossianIngebrandtPlatenetal.2006,
  author    = {Poghossian, Arshak and Ingebrandt, S. and Platen, J. and Sch{\"o}ning, Michael Josef},
  title     = {Field-effect sensors with charged macromolecules - from micro towards nano aspects},
  series = {Biochemical Sensing Utilisation of Micro-and Nanotechnologies, Warschau, Nov. 2005 : Lecture Notes of the ICB Seminar / ed.: M. Mascini, W. Torbicz},
  booktitle = {Biochemical Sensing Utilisation of Micro-and Nanotechnologies, Warschau, Nov. 2005 : Lecture Notes of the ICB Seminar / ed.: M. Mascini, W. Torbicz},
  publisher = {Polish Academy Sciences Press},
  address   = {Warsaw},
  pages     = {74 -- 81},
  year      = {2006},
  language  = {en}
}