@article{SchoeningWeidenbrueckThustetal.1997, author = {Sch{\"o}ning, Michael Josef and Weidenbr{\"u}ck, B. and Thust, M. and Kordos, P. and L{\"u}th, H.}, title = {A silicon-based sensor array with capacitive EIS structures}, series = {Proceedings of the 11th European Conference on Solid-State Transducers / Eurosensors XI, September 21 - 24, 1997, Warsaw, Poland. [Organised by] Warsaw University of Technology. Vol 2.}, journal = {Proceedings of the 11th European Conference on Solid-State Transducers / Eurosensors XI, September 21 - 24, 1997, Warsaw, Poland. [Organised by] Warsaw University of Technology. Vol 2.}, publisher = {Sensor Lab Sp.}, address = {Warsaw}, isbn = {83-908335-0-6}, pages = {871 -- 874}, year = {1997}, language = {en} }