@inproceedings{SchoeningAbouzarWagneretal.2006, author = {Sch{\"o}ning, Michael Josef and Abouzar, Maryam H. and Wagner, Torsten and N{\"a}ther, Niko and Rolka, David and Yoshinobu, Tatsuo and Kloock, Joachim P. and Turek, Monika and Ingebrandt, Sven and Poghossian, Arshak}, title = {A semiconductor-based field-effect platform for (bio-)chemical and physical sensors: From capacitive EIS sensors and LAPS over ISFETs to nano-scale devices}, series = {MRS Proceedings}, booktitle = {MRS Proceedings}, doi = {10.1557/PROC-0952-F08-02}, pages = {1 -- 9}, year = {2006}, language = {en} }