@article{KaemperEhrfeldLehretal.1993,
  author    = {K{\"a}mper, Klaus-Peter and Ehrfeld, W. and Lehr, H. and Michel, F.},
  title     = {LIGA-Technik zur Fertigung von Mikroaktoren. Ehrfeld. W.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.},
  series = {Mikroelektronik . 7 (1993), H. 5},
  journal   = {Mikroelektronik . 7 (1993), H. 5},
  isbn      = {0931-2714},
  pages     = {LXIX -- LXXI},
  year      = {1993},
  language  = {de}
}
@article{KaemperLehrEhrfeldetal.1994,
  author    = {K{\"a}mper, Klaus-Peter and Lehr, H. and Ehrfeld, W. and Michel, F.},
  title     = {LIGA Components for the Construction of Milliactuators. Lehr, H.; Ehrfeld, W.; K{\"a}mper, K.-P.; Michel, F.; Schmidt, M.},
  series = {1994 IEEE Symposium on Emerging Technologies \& Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN},
  journal   = {1994 IEEE Symposium on Emerging Technologies \& Factory Automation : novel disciplines for the next century ; proceedings, November 6 - 10, 1994, Tokyo, Japan / ETFA '94. Hiroyuki Fujita [chairman] ... Sponsored by: Institute of Industrial Science, SEIKEN},
  address   = {Piscataway, N.J.},
  isbn      = {0780321146},
  pages     = {43 -- 47},
  year      = {1994},
  language  = {en}
}
@article{KaemperHagemannLehretal.1995,
  author    = {K{\"a}mper, Klaus-Peter and Hagemann, B. and Lehr, H. and Michel, F.},
  title     = {LIGA Example 2: Electromagnetic Micromotor. Hagemann, B.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.; Th{\"u}rigen, C.},
  series = {LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed.},
  journal   = {LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed.},
  publisher = {FSRM},
  address   = {Neuchatel},
  pages     = {100 -- 110},
  year      = {1995},
  language  = {en}
}