@article{WissenBogdanskiScheeretal.2005, author = {Wissen, M. and Bogdanski, N. and Scheer, H.-C. and Bitz, Andreas and Ahrens, G. and Gruetzner, G.}, title = {Implication of the light polarisation for UV curing of pre-patterned resists}, series = {Microelectronic Engineering}, volume = {78-79}, journal = {Microelectronic Engineering}, issn = {0167-9317}, doi = {10.1016/j.mee.2004.12.099}, pages = {659 -- 664}, year = {2005}, language = {en} }