@article{MoritzYoshinobuFingeretal.2004, author = {Moritz, W. and Yoshinobu, T. and Finger, F. and Krause, S. and Martin-Fernandez, M. and Sch{\"o}ning, Michael Josef}, title = {High resolution LAPS using amorphous silicon as the semiconductor material}, series = {Sensors and Actuators B. 103 (2004), H. 1-2}, journal = {Sensors and Actuators B. 103 (2004), H. 1-2}, isbn = {0925-4005}, pages = {436 -- 444}, year = {2004}, language = {en} }