@article{SchoeningThustMuellerVeggianetal.1998, author = {Sch{\"o}ning, Michael Josef and Thust, M. and M{\"u}ller-Veggian, Mattea and Kordos, P.}, title = {A novel silicon-based sensor array with capacitive EIS structures}, series = {Sensors and Actuators B. 47 (1998), H. 1-3}, journal = {Sensors and Actuators B. 47 (1998), H. 1-3}, isbn = {0925-4005}, pages = {225 -- 230}, year = {1998}, language = {en} } @article{SchoeningThustSteffenetal.1998, author = {Sch{\"o}ning, Michael Josef and Thust, M. and Steffen, A. and M{\"u}ller-Veggian, Mattea}, title = {Kapazitives Sensorarray in Siliziumtechnik f{\"u}r die ProzeƟ{\"u}berwachung}, series = {ITG-Fachbericht. 148 (1998)}, journal = {ITG-Fachbericht. 148 (1998)}, isbn = {0341-0196}, pages = {257 -- 263}, year = {1998}, language = {de} } @article{SchoeningThustKordosetal.1998, author = {Sch{\"o}ning, Michael Josef and Thust, M. and Kordos, P. and L{\"u}th, H. and Ronkel, F. and Schultze, J. W.}, title = {Halbleiter-Schichtstrukturen mit por{\"o}sem Silizium als Chemo- und Biosensoren}, series = {ITG-Fachbericht. 148 (1998)}, journal = {ITG-Fachbericht. 148 (1998)}, isbn = {0341-0196}, pages = {33 -- 40}, year = {1998}, language = {de} } @article{ThustSchrothToepleretal.1998, author = {Thust, M. and Schroth, P. and T{\"o}pler, A. and Sch{\"o}ning, Michael Josef and M{\"u}ller-Veggian, Mattea and Kordos, P. and L{\"u}th, H.}, title = {Improving the detection limit of a capacitive sensor by means of a diffusion barrier}, series = {Eurosensors XII : proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Southampton, UK, 13 - 16 September 1998 / ed. by N. M. White ; Vol. 1}, journal = {Eurosensors XII : proceedings of the 12th European Conference on Solid-State Transducers and the 9th UK Conference on Sensors and their Applications, Southampton, UK, 13 - 16 September 1998 / ed. by N. M. White ; Vol. 1}, publisher = {Inst. of Physics Publ.}, address = {Bristol [u.a.]}, isbn = {0-7503-0595-9}, pages = {507 -- 510}, year = {1998}, language = {en} } @article{SchoeningMalkocThustetal.1998, author = {Sch{\"o}ning, Michael Josef and Malkoc, {\"U}. and Thust, M. and Steffen, A. and Kordos, P. and L{\"u}th, H.}, title = {Novel electrochemical sensors with structured and porous semiconductor/insulator capacitors}, series = {Proceedings of the Seventh International Meeting on Chemical Sensors : 27 - 30 July, 1998, Beijing, P. R. China / ed. Zhi-Gang Zhou}, journal = {Proceedings of the Seventh International Meeting on Chemical Sensors : 27 - 30 July, 1998, Beijing, P. R. China / ed. Zhi-Gang Zhou}, publisher = {Elsevier}, address = {Amsterdam [u.a.]}, pages = {885 -- 887}, year = {1998}, language = {en} }