@article{KaemperLehrAbeletal.1996, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Abel, S. and D{\"o}pper, J.}, title = {Microactuators as driving units for microrobotic systems. Herstellung von Mikroaktoren mit dem LIGA-Verfahren f{\"u}r Mikroroboter / Lehr, H.; Abel, S.; D{\"o}pper, J.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Schulu, c.; Th{\"u}rigen, C.}, series = {Proceedings of the SPIE - The International Society for Optical Engineering}, journal = {Proceedings of the SPIE - The International Society for Optical Engineering}, isbn = {0277-786X}, pages = {202 -- 210}, year = {1996}, language = {en} } @article{KaemperLehrAbeletal.1995, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Abel, S. and Ehrfeld, W.}, title = {Assembly of Electromagnetic Milliactuators with LIGA Components. Lehr, H.; Abel, S.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Th{\"u}rigen, C.}, series = {Proceedings 2nd Japan-France Congress on Mechatronics, Takamatsu (Kagawa, Japan) 1.-3. November 1994, 31 (1994)}, journal = {Proceedings 2nd Japan-France Congress on Mechatronics, Takamatsu (Kagawa, Japan) 1.-3. November 1994, 31 (1994)}, publisher = {Fuji Technology Press}, pages = {31 -- 31}, year = {1995}, language = {en} } @article{KaemperLehrAbeletal.1996, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Abel, S. and Ehrfeld, W.}, title = {Entwicklung von elektromagnetischen Mikroaktoren. Lehr, H.; Abel, S.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Th{\"u}rigen, C.}, series = {41. Internationales Wissenschaftliches Kolloquium, Wandel im Maschinenbau durch Feinwerktechik und Mikrosystemtechnik, Bd. 1, Ilmenau, DE, 23.-26. Sep, 1996}, journal = {41. Internationales Wissenschaftliches Kolloquium, Wandel im Maschinenbau durch Feinwerktechik und Mikrosystemtechnik, Bd. 1, Ilmenau, DE, 23.-26. Sep, 1996}, pages = {158 -- 163}, year = {1996}, language = {de} }