@article{SchoeningThustSteffenetal.1998,
  author    = {Sch{\"o}ning, Michael Josef and Thust, M. and Steffen, A. and M{\"u}ller-Veggian, Mattea},
  title     = {Kapazitives Sensorarray in Siliziumtechnik f{\"u}r die Prozeß{\"u}berwachung},
  series = {ITG-Fachbericht. 148 (1998)},
  journal   = {ITG-Fachbericht. 148 (1998)},
  isbn      = {0341-0196},
  pages     = {257 -- 263},
  year      = {1998},
  language  = {de}
}