@article{KaemperDoepperEhrfeldetal.1998,
  author    = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Ehrfeld, W. and Oberbeck, S.},
  title     = {A self-filling low-cost membrane micropump},
  series = {Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division},
  journal   = {Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division},
  publisher = {IEEE Service Center},
  address   = {Piscataway, NJ},
  isbn      = {078034412X},
  pages     = {432 -- 437},
  year      = {1998},
  language  = {en}
}