@article{PrumeGerberKuegeleretal.2004, author = {Prume, Klaus and Gerber, Peter and K{\"u}geler, Carsten and Roelofs, Andreas}, title = {Simulation and measurements of the piezoelectric properties response (d33) of piezoelectric layered thin film structures influenced by the top-electrode size / Prume, K. ; Gerber, P. ; K{\"u}geler, C. ; Roelofs, A. ; B{\"o}ttger, U. ; Waser, R. ; Schmitz-Kempen,}, isbn = {0-7803-8410-5}, pages = {7 -- 10}, year = {2004}, language = {en} } @article{PrumeRaederTyholdtetal.2007, author = {Prume, Klaus and Raeder, H. and Tyholdt, F. and Booij, W. E.}, title = {Taking piezoelectric microsystems from the laboratory to production / Raeder, H. ; Tyholdt, F. ; Booij, W. ; Calame, F. ; Ostbo, N. P. ; Bredesen, R. ; Prume, K. ; Rijnders, G. ; Muralt, P.}, series = {Journal of Electroceramics. 19 (2007), H. 4}, journal = {Journal of Electroceramics. 19 (2007), H. 4}, isbn = {1385-3449}, pages = {357 -- 362}, year = {2007}, language = {en} }