@article{KaemperKurzawaSchmittetal.1986, author = {K{\"a}mper, Klaus-Peter and Kurzawa, R. and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Spin-resolved photoemission study of in situ grown epitaxial Fe layers on W(110). Kurzawa, R.; K{\"a}mper, K.-P.; Schmitt, W.; G{\"u}ntherodt, G.}, series = {Solid State Communications. 60 (1986), H. 10}, journal = {Solid State Communications. 60 (1986), H. 10}, isbn = {0038-1098}, pages = {777 -- 780}, year = {1986}, language = {en} } @article{KaemperBergBegemannetal.1998, author = {K{\"a}mper, Klaus-Peter and Berg, U. and Begemann, M. and Hagemann, B. (u.a.)}, title = {Series production and testing of a micro motor. Serienfertigung und Pr{\"u}fung eines Mikromotors}, series = {Actuator 98 : 6th International Conference on New Actuators ; 17 - 19 June, 1998, Bremen, Germany ; conference proceedings / ed.: Hubert Borgmann ...}, journal = {Actuator 98 : 6th International Conference on New Actuators ; 17 - 19 June, 1998, Bremen, Germany ; conference proceedings / ed.: Hubert Borgmann ...}, publisher = {Messe Bremen}, address = {Bremen}, isbn = {3-933339-00-6}, pages = {552 -- 555}, year = {1998}, language = {en} } @article{KaemperDoepperClemensetal.1997, author = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Clemens, M. and Ehrfeld, W.}, title = {Micro gear pumps for dosing of viscous fluids. / D{\"o}pper, J. (u.a.)}, series = {Journal of Micromechanics and Microengineering. 7 (1997), H. 3}, journal = {Journal of Micromechanics and Microengineering. 7 (1997), H. 3}, isbn = {0960-1317}, pages = {230 -- 232}, year = {1997}, language = {en} } @article{KaemperLehrAbeletal.1996, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Abel, S. and D{\"o}pper, J.}, title = {Microactuators as driving units for microrobotic systems. Herstellung von Mikroaktoren mit dem LIGA-Verfahren f{\"u}r Mikroroboter / Lehr, H.; Abel, S.; D{\"o}pper, J.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Schulu, c.; Th{\"u}rigen, C.}, series = {Proceedings of the SPIE - The International Society for Optical Engineering}, journal = {Proceedings of the SPIE - The International Society for Optical Engineering}, isbn = {0277-786X}, pages = {202 -- 210}, year = {1996}, language = {en} } @article{Kaemper1996, author = {K{\"a}mper, Klaus-Peter}, title = {Development of low-cost injection moulded micropumps. Entwicklung von kosteng{\"u}nstigen, mittels Spritzguß hergestellten Mikropumpen / D{\"o}pper, J. (u.a.)}, series = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, journal = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, address = {Bremen}, pages = {37 -- 40}, year = {1996}, language = {en} } @article{KaemperPicardBrilletal.2003, author = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlef (u.a.)}, title = {The Virtual Cleanroom - a new tool in teaching MST process technologies}, series = {mst news International newsletter on micro - nano Integration (2003)}, journal = {mst news International newsletter on micro - nano Integration (2003)}, isbn = {0948-3128}, pages = {35 -- 36}, year = {2003}, language = {en} } @inproceedings{MertenConradKaemperetal.2006, author = {Merten, Sabine and Conrad, Thorsten and K{\"a}mper, Klaus-Peter and Picard, Antoni and Sch{\"u}tze, Andreas}, title = {Virtual Technology Labs - an efficient tool for the preparation of hands-on-MEMS-courses in training foundries}, year = {2006}, abstract = {Hands-on-training in high technology areas is usually limited due to the high cost for lab infrastructure and equipment. One specific example is the field of MEMS, where investment and upkeep of clean rooms with microtechnology equipment is either financed by production or R\&D projects greatly reducing the availability for education purposes. For efficient hands-on-courses a MEMS training foundry, currently used jointly by six higher education institutions, was established at FH Kaiserslautern. In a typical one week course, students manufacture a micromachined pressure sensor including all lithography, thin film and packaging steps. This compact and yet complete program is only possible because participants learn to use the different complex machines in advance via a Virtual Training Lab (VTL). In this paper we present the concept of the MEMS training foundry and the VTL preparation together with results from a scientific evaluation of the VTL over the last three years.}, subject = {Virtuelles Laboratorium}, language = {en} } @misc{Kaemper2007, author = {K{\"a}mper, Klaus-Peter}, title = {Lecture notes Sensors and Actuators}, year = {2007}, abstract = {Kennwortgesch{\"u}tzter Zugang nur f{\"u}r Studierende bei Prof. Dr. Klaus-Peter K{\"a}mper. Wintersemester 2007/2008. Version vom 30.08.2007. 472 Seiten (pdf-Format)}, subject = {Sensor}, language = {en} } @article{KaemperPicardBrilletal.2003, author = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlev and Jentsch, Andreas and Merten, Sabine and Rollwa, Markus}, title = {The Virtual Clean Room - a new tool in teaching MST process technologies}, year = {2003}, abstract = {The Virtual Clean Room - a new tool in teaching MST process technologies University education in high-technology fields like MST is not complete without intensive laboratory sessions. Students cannot fully grasp the complexity and the special problems related to the manufacturing of microsystems without a thorough hands-on experience in a MST clean room.}, subject = {Virtuelle Maschine}, language = {en} } @misc{Kaemper2008, author = {K{\"a}mper, Klaus-Peter}, title = {Lecture notes Sensors and Actuators WS 2008/2009}, year = {2008}, abstract = {Password necessarily. Access only for Students by Prof. Dr. Klaus-Peter K{\"a}mper. Winter semester 2008/2009. 488 pages (pdf) Contents 1. Introduction 2. Introduction to Sensors 3. Introduction to Microfabrication 4. Pressure Sensors 5. Acceleration Sensors 6. Angular Rate Sensors 7. Position Sensors 8. Flow Sensors 9. Piezoelectric Actuators 10. Magnetostrictive Actuators 11. Actuators based on Shape Memory Alloys 12. Actuators based on Electrorheological Fluids 13. Actuators based on Magnetorheological Fluids 14. Index}, subject = {Sensor}, language = {en} } @article{KaemperDoepperEhrfeldetal.1995, author = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Ehrfeld, W. and Hagemann, B.}, title = {Simulation supported design of LIGA Microsystems. K{\"a}mper, K.-P.; D{\"o}pper, J.; Ehrfeld, W.; Hagemann, B.; Hill, S.D.J.; Lehr, H.}, series = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey}, journal = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey}, publisher = {Computational Mechanics Publ.}, address = {Southampton [u.a.]}, isbn = {1-85312-390-0}, pages = {3 -- 10}, year = {1995}, language = {en} } @article{KaemperDoepperEhrfeldetal.1995, author = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Ehrfeld, W. and Hagemann, B.}, title = {An investigation of computer modelling for micro-injection moulding. Hill, S.D.J.; K{\"a}mper, K.-P.; Dasbach, U.; D{\"o}pper, J.; Ehrfeld, W.; Kaupert, M.}, series = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey}, journal = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey}, publisher = {Computational Mechanics Publ.}, address = {Southampton [u.a.]}, isbn = {1-85312-390-0}, pages = {275}, year = {1995}, language = {en} } @article{KaemperEhrfeldHagemannetal.1996, author = {K{\"a}mper, Klaus-Peter and Ehrfeld, W. and Hagemann, B. and Lehr, H.}, title = {Electromagnetic permanent magnet micromotor with integrated micro gear box. K{\"a}mper, K.-P.; Ehrfeld, W.; Hagemann, B.; Lehr, H.; Michel, F.; Schirling, A.; Th{\"u}rigen, C.; Wittig, T.}, series = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, journal = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, address = {Bremen}, pages = {429}, year = {1996}, language = {en} } @article{KaemperEhrfeldDoepperetal.1997, author = {K{\"a}mper, Klaus-Peter and Ehrfeld, W. and D{\"o}pper, J. and Hessel, V.}, title = {Microfluidic components for biological and chemical microreactors. K{\"a}mper, K.-P.; Ehrfeld, W.; D{\"o}pper, J.; Hessel, V.; Lehr, H.; L{\"o}we, H.; Richter, T.; Wolf, A.}, series = {Proceedings : an investigation of micro structures, sensors, actuators, machines and robots ; Nagoya, Japan, January 26 - 30, 1997 / IEEE Robotics and Automation Society ...}, journal = {Proceedings : an investigation of micro structures, sensors, actuators, machines and robots ; Nagoya, Japan, January 26 - 30, 1997 / IEEE Robotics and Automation Society ...}, publisher = {IEEE Service Center}, address = {Piscataway, NJ}, isbn = {0-7803-3744-1}, pages = {338 -- 343}, year = {1997}, language = {en} } @article{KaemperEhrfeldHesseletal.1997, author = {K{\"a}mper, Klaus-Peter and Ehrfeld, W. and Hessel, V. and Lacher, M.}, title = {Market oriented development and production of microdevices. Ehrfeld, W.; Hessel, V.; K{\"a}mper, K.-P.; Lacher, M.; Picard, A.; Schmidt, M.; Schulz, C.}, series = {Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1}, journal = {Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1}, publisher = {IEEE Service Center}, address = {Piscataway, NJ}, isbn = {0-7803-3664-X}, pages = {71 -- 79}, year = {1997}, language = {en} } @article{KaemperLehrEhrfeldetal.1997, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Ehrfeld, W. and Hagemann, B.}, title = {Development of micro and millimotors. Lehr, H.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Schulz, C.; Th{\"u}rigen C.}, series = {Minimally Invasive Therapy and Allied Technologies. 6 (1997)}, journal = {Minimally Invasive Therapy and Allied Technologies. 6 (1997)}, isbn = {1364-5706}, year = {1997}, language = {en} } @article{KaemperDoepperEhrfeldetal.1998, author = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Ehrfeld, W. and Oberbeck, S.}, title = {A self-filling low-cost membrane micropump}, series = {Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division}, journal = {Proceedings : an investigation of micro structures, sensors, actuators, machines and systems / sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division}, publisher = {IEEE Service Center}, address = {Piscataway, NJ}, isbn = {078034412X}, pages = {432 -- 437}, year = {1998}, language = {en} } @article{Kaemper2003, author = {K{\"a}mper, Klaus-Peter}, title = {Education and Training in MST. K{\"a}mper, K.-P.; Picard, A.; Brill, M.; Cassel, D.; Jentsch, A.; Merten, S.; Rollwa, M.}, series = {Mst-News (2003)}, journal = {Mst-News (2003)}, isbn = {0948-3128}, pages = {35}, year = {2003}, language = {en} } @article{KaemperSchmittGuentherodt1987, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {The influence of adsorbates on the spin-resolved photoemission of Ni(110). Schmitt, W.; K{\"a}mper, K.-P.; G{\"u}ntherodt, G.}, series = {Surface Science. 189/190 (1987)}, journal = {Surface Science. 189/190 (1987)}, isbn = {0039-6028}, pages = {741 -- 507}, year = {1987}, language = {en} } @article{KaemperSchmittWesneretal.1989, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and Wesner, D. A. and G{\"u}ntherodt, G.}, title = {Thickness dependence of the spin- and angle-resolved photoemission of ultrathin, epitaxial Ni(111)/W(110) layers}, series = {Applied Physics A: Materials Science and Processing. 49 (1989), H. 6}, journal = {Applied Physics A: Materials Science and Processing. 49 (1989), H. 6}, isbn = {1432-0630}, pages = {573 -- 578}, year = {1989}, language = {en} }