@article{SchoeningKurowskiThustetal.2000, author = {Sch{\"o}ning, Michael Josef and Kurowski, A. and Thust, M. and Kordos, P. and Schultze, J. W. and L{\"u}th, H.}, title = {Capacitive microsensors for biochemical sensing on porous silicon technology}, series = {Sensors and Actuators B. 64 (2000), H. 1-3}, journal = {Sensors and Actuators B. 64 (2000), H. 1-3}, isbn = {0925-4005}, pages = {59 -- 64}, year = {2000}, language = {en} }