@article{KaemperEhrfeldHesseletal.1997,
  author    = {K{\"a}mper, Klaus-Peter and Ehrfeld, W. and Hessel, V. and Lacher, M.},
  title     = {Market oriented development and production of microdevices. Ehrfeld, W.; Hessel, V.; K{\"a}mper, K.-P.; Lacher, M.; Picard, A.; Schmidt, M.; Schulz, C.},
  series = {Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1},
  journal   = {Proceedings : 21th International Conference on Microelectronics : MIEL '97 ; Niš, Yugoslavia, 14-17 September 1997. Vol. 1},
  publisher = {IEEE Service Center},
  address   = {Piscataway, NJ},
  isbn      = {0-7803-3664-X},
  pages     = {71 -- 79},
  year      = {1997},
  language  = {en}
}