@article{KaemperAbrahamEhrfeldetal.1998, author = {K{\"a}mper, Klaus-Peter and Abraham, M. and Ehrfeld, W. and Hessel, V.}, title = {Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; K{\"a}mper, K.-P.; Lacher, M.; Picard, A.}, series = {Microelectronic Engineering. 41-42 (1998)}, journal = {Microelectronic Engineering. 41-42 (1998)}, isbn = {0167-9317}, pages = {47 -- 52}, year = {1998}, language = {en} }