@article{KaemperAbrahamEhrfeldetal.1998,
  author    = {K{\"a}mper, Klaus-Peter and Abraham, M. and Ehrfeld, W. and Hessel, V.},
  title     = {Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; K{\"a}mper, K.-P.; Lacher, M.; Picard, A.},
  series = {Microelectronic Engineering. 41-42 (1998)},
  journal   = {Microelectronic Engineering. 41-42 (1998)},
  isbn      = {0167-9317},
  pages     = {47 -- 52},
  year      = {1998},
  language  = {en}
}
@article{KaemperDoepperEhrfeldetal.1995,
  author    = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Ehrfeld, W. and Hagemann, B.},
  title     = {Simulation supported design of LIGA Microsystems. K{\"a}mper, K.-P.; D{\"o}pper, J.; Ehrfeld, W.; Hagemann, B.; Hill, S.D.J.; Lehr, H.},
  series = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey},
  journal   = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey},
  publisher = {Computational Mechanics Publ.},
  address   = {Southampton [u.a.]},
  isbn      = {1-85312-390-0},
  pages     = {3 -- 10},
  year      = {1995},
  language  = {en}
}