@article{KaemperSchulzEhrfeldetal.1994, author = {K{\"a}mper, Klaus-Peter and Schulz, C. and Ehrfeld, W. and Erbel, R.}, title = {LIGA Fabricated Microsystems for Medical and Related Applications. Schulz, C.; Ehrfeld, W.; Erbel, R.; K{\"a}mper, K.-P.; Koch, L.; Lehr, H.; Roth, T.}, series = {3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...]}, journal = {3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...]}, publisher = {REPRO EPFL}, address = {Lausanne}, pages = {Getr. Z{\"a}hlung : Ill., graph. Darst.}, year = {1994}, language = {en} } @article{KaemperLacherAbrahametal.1995, author = {K{\"a}mper, Klaus-Peter and Lacher, M. and Abraham, M. and Ehrfeld, W.}, title = {Mikrosysteme f{\"u}r die Luft- und Raumfahrt. Lacher, M.; Abraham, M.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Lehr, H.; Picard, A.; Zetterer, T.}, series = {Deutscher Luft- und Raumfahrtkongreß 1995/1 (1995). Bonn, 26. - 29. September 1995 Motto: "Luft- und Raumfahrt - Schl{\"u}sseltechnologien f{\"u}r das 21. Jahrhundert"}, journal = {Deutscher Luft- und Raumfahrtkongreß 1995/1 (1995). Bonn, 26. - 29. September 1995 Motto: "Luft- und Raumfahrt - Schl{\"u}sseltechnologien f{\"u}r das 21. Jahrhundert"}, publisher = {Deutsche Gesellschaft f{\"u}r Luft- und Raumfahrt}, address = {Lilienthal-Oberth}, pages = {415 -- 423}, year = {1995}, language = {de} } @article{KaemperPicardSchuetzeetal.2006, author = {K{\"a}mper, Klaus-Peter and Picard, A. and Sch{\"u}tze, A. and Wallach, D.}, title = {Adopting the Foundry Concept of Semiconductor Fabrication on Educational Schemes and the Virtual Technology Lab (VTL). Picard, A.; K{\"a}mper, K.-P.; Sch{\"u}tze, A.; Wallach, D.; Walter, T.}, series = {Mst-News (2006)}, journal = {Mst-News (2006)}, isbn = {0948-3128}, pages = {15, 16 -- u. 35}, year = {2006}, language = {en} } @article{KaemperDoepperEhrfeldetal.1995, author = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Ehrfeld, W. and Hagemann, B.}, title = {Simulation supported design of LIGA Microsystems. K{\"a}mper, K.-P.; D{\"o}pper, J.; Ehrfeld, W.; Hagemann, B.; Hill, S.D.J.; Lehr, H.}, series = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey}, journal = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey}, publisher = {Computational Mechanics Publ.}, address = {Southampton [u.a.]}, isbn = {1-85312-390-0}, pages = {3 -- 10}, year = {1995}, language = {en} } @article{KaemperDoepperEhrfeldetal.1995, author = {K{\"a}mper, Klaus-Peter and D{\"o}pper, J. and Ehrfeld, W. and Hagemann, B.}, title = {An investigation of computer modelling for micro-injection moulding. Hill, S.D.J.; K{\"a}mper, K.-P.; Dasbach, U.; D{\"o}pper, J.; Ehrfeld, W.; Kaupert, M.}, series = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey}, journal = {Simulation and design of microsystems and microstructures : [... contains the papers presented at the First International Conference on the Simulation and Design of Microsystems and Microstructures, MicroSIM '95, which was held in Southampton, UK, in September 1995] / [organised by: Wessex Institute of Technology, UK]. Ed.: R. A. Adey}, publisher = {Computational Mechanics Publ.}, address = {Southampton [u.a.]}, isbn = {1-85312-390-0}, pages = {275}, year = {1995}, language = {en} } @article{KaemperSchulzArnoldetal.1995, author = {K{\"a}mper, Klaus-Peter and Schulz, C. and Arnold, J. and Detter, H.}, title = {Anwendungen der LIGA-Technik f{\"u}r medizinische Diagnose- und Therapiesysteme. Schulz, C.; Arnold, J.; Detter, H.; D{\"o}pper, J.; Ehrfeld, W., Erbel, R.; K{\"a}mper, K.-P.; Koch, L.; Lehr, H.; Roth, T.}, series = {Elektrotechnik und Informationstechnik. 112 (1995), H. 9}, journal = {Elektrotechnik und Informationstechnik. 112 (1995), H. 9}, isbn = {0932-383X}, pages = {493}, year = {1995}, language = {de} } @article{KaemperThuerigenEhrfeldetal.1996, author = {K{\"a}mper, Klaus-Peter and Th{\"u}rigen, C. and Ehrfeld, W. and Hagemann, B.}, title = {Gesichtspunkte beim Miniaturisieren von Umlaufr{\"a}dergetrieben. Th{\"u}rigen, C.; Ehrfeld, W. ; Hagemann, B.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.}, series = {Innovative Kleinantriebe : Tagung Mainz, 9. und 10. Mai 1996 / VDE-VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, GMM}, journal = {Innovative Kleinantriebe : Tagung Mainz, 9. und 10. Mai 1996 / VDE-VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, GMM}, publisher = {VDI-Verl.}, address = {D{\"u}sseldorf}, isbn = {3-18-091269-3}, pages = {235}, year = {1996}, language = {de} } @article{KaemperLehrEhrfeldetal.1996, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Ehrfeld, W. and Hagemann, B.}, title = {Entwicklung von Mikroantrieben am Institut f{\"u}r Mikrotechnik Mainz. Lehr, H.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Th{\"u}rigen, C.}, series = {Innovative Kleinantriebe : Tagung Mainz, 9. und 10. Mai 1996 / VDE-VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, GMM}, journal = {Innovative Kleinantriebe : Tagung Mainz, 9. und 10. Mai 1996 / VDE-VDI-Gesellschaft Mikroelektronik, Mikro- und Feinwerktechnik, GMM}, publisher = {VDI-Verl.}, address = {D{\"u}sseldorf}, isbn = {3-18-091269-3}, pages = {77}, year = {1996}, language = {de} } @article{KaemperEhrfeldHagemannetal.1996, author = {K{\"a}mper, Klaus-Peter and Ehrfeld, W. and Hagemann, B. and Lehr, H.}, title = {Electromagnetic permanent magnet micromotor with integrated micro gear box. K{\"a}mper, K.-P.; Ehrfeld, W.; Hagemann, B.; Lehr, H.; Michel, F.; Schirling, A.; Th{\"u}rigen, C.; Wittig, T.}, series = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, journal = {Actuator 96 : Conference Proceedings ; 5th International Conference on New Actuators ; 26- 28 June, Bremen, Germany / Ed.: Hubert Borgmann. Publ. by: AXON Technology Consult GmbH}, address = {Bremen}, pages = {429}, year = {1996}, language = {en} } @article{KaemperBergLehretal.1996, author = {K{\"a}mper, Klaus-Peter and Berg, U. and Lehr, H. and Ehrfeld, W.}, title = {Experimentelle Untersuchungen zur automatisierten Mikrolinsenmontage. Berg, U.; K{\"a}mper, K.-P.; Lehr, H.; Ehrfeld, W.}, series = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart}, journal = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart}, year = {1996}, language = {de} } @article{KaemperBergWolfetal.1996, author = {K{\"a}mper, Klaus-Peter and Berg, U. and Wolf, A. and Lehr, H.}, title = {Entwicklung von Linsenhaltern f{\"u}r ein SMIF-kompatibles Magazinsystem und deren Fertigung durch Mikrospritzguß. Berg, U.; K{\"a}mper, K.-P.; Wolf, A.; Lehr, H.; Ehrfeld, W.}, series = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart}, journal = {Produktionstechnik f{\"u}r Mikrosysteme. IPA-Seminar, 5. und 6. November 1996, Stuttgart. Pro Mikro. Fraunhofer-Institut f{\"u}r Produktionstechnik und Automatisierung -IPA-, Stuttgart}, year = {1996}, language = {de} } @article{KaemperLehrAbeletal.1996, author = {K{\"a}mper, Klaus-Peter and Lehr, H. and Abel, S. and Ehrfeld, W.}, title = {Entwicklung von elektromagnetischen Mikroaktoren. Lehr, H.; Abel, S.; Ehrfeld, W.; Hagemann, B.; K{\"a}mper, K.-P.; Michel, F.; Th{\"u}rigen, C.}, series = {41. Internationales Wissenschaftliches Kolloquium, Wandel im Maschinenbau durch Feinwerktechik und Mikrosystemtechnik, Bd. 1, Ilmenau, DE, 23.-26. Sep, 1996}, journal = {41. Internationales Wissenschaftliches Kolloquium, Wandel im Maschinenbau durch Feinwerktechik und Mikrosystemtechnik, Bd. 1, Ilmenau, DE, 23.-26. Sep, 1996}, pages = {158 -- 163}, year = {1996}, language = {de} } @article{KaemperHagemannEhrfeldetal.1996, author = {K{\"a}mper, Klaus-Peter and Hagemann, B. and Ehrfeld, W. and Lehr, H.}, title = {Berechnung und Optimierung von Permanentmagnet-Mikromotoren mit Hilfe der Finite-Elemente-Methode. Hagemann, B.; Ehrfeld, W.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.; Th{\"u}rigen, C.}, series = {Simulation mit der Finite-Elemente-Methode in Feinwerk- und Mikrotechnik, M{\"u}nchen, 12. M{\"a}rz. 1996}, journal = {Simulation mit der Finite-Elemente-Methode in Feinwerk- und Mikrotechnik, M{\"u}nchen, 12. M{\"a}rz. 1996}, pages = {1 -- 13}, year = {1996}, language = {de} } @article{KaemperAbrahamEhrfeldetal.1998, author = {K{\"a}mper, Klaus-Peter and Abraham, M. and Ehrfeld, W. and Hessel, V.}, title = {Microsystem technology: Between research and industrial application. Abraham, M.; Ehrfeld, W.; Hessel, V.; K{\"a}mper, K.-P.; Lacher, M.; Picard, A.}, series = {Microelectronic Engineering. 41-42 (1998)}, journal = {Microelectronic Engineering. 41-42 (1998)}, isbn = {0167-9317}, pages = {47 -- 52}, year = {1998}, language = {en} } @article{KaemperSchmittGuentherodt1988, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Temperature dependence of the exchange splitting of Ni along the \&\#61511;-L line}, series = {Journal de physique. 49 (1988), H. 12. Supplement, Colloque C8}, journal = {Journal de physique. 49 (1988), H. 12. Supplement, Colloque C8}, pages = {39 -- 40}, year = {1988}, language = {en} } @article{KaemperHagemannLehretal.1995, author = {K{\"a}mper, Klaus-Peter and Hagemann, B. and Lehr, H. and Michel, F.}, title = {LIGA Example 2: Electromagnetic Micromotor. Hagemann, B.; K{\"a}mper, K.-P.; Lehr, H.; Michel, F.; Th{\"u}rigen, C.}, series = {LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed.}, journal = {LIGA technique / Hans-Dieter Bauer (ed.). [Developed by UETP-MEMS, University Training Partnership for Micro-Electro-Mechanical Systems ...]. - 2.ed.}, publisher = {FSRM}, address = {Neuchatel}, pages = {100 -- 110}, year = {1995}, language = {en} } @article{KaemperPicardSchuetze2007, author = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Sch{\"u}tze, Andreas}, title = {K{\"o}nnen Studierende einen piezoresistiven Drucksensor in einer Woche selbst{\"a}ndig fertigen?}, series = {Interesse wecken, Motivation steigern, Praxisorientiert ausbilden : Nachwuchsf{\"o}rderung und innovative Ausbildung in Sensorik und Mikrosystemtechnik : [anl{\"a}ßlich der Sondersession auf der Sensor+Test 2007]}, journal = {Interesse wecken, Motivation steigern, Praxisorientiert ausbilden : Nachwuchsf{\"o}rderung und innovative Ausbildung in Sensorik und Mikrosystemtechnik : [anl{\"a}ßlich der Sondersession auf der Sensor+Test 2007]}, publisher = {AWNET}, address = {Berlin}, isbn = {978-3-89750-148-5}, pages = {26 -- 35}, year = {2007}, language = {de} } @inproceedings{MertenKaemperBrilletal.2003, author = {Merten, Sabine and K{\"a}mper, Klaus-Peter and Brill, Manfred and Picard, Antoni and Cassel, Detlev and Jentsch, Andreas and Rollwa, Markus}, title = {Virtuelle Sensor-Fertigung: Hightech mit LabVIEW}, year = {2003}, abstract = {Eine neue Generation von Praktika an Hochschulen w{\"a}chst heran. Moderne Wege beim Verstehen und Erlernen naturwissenschaftlicher Zusammenh{\"a}nge sowie industrieller Fertigungsprozesse sind gefordert. Das Technologiepraktikum „Virtuelle Sensor- Fertigung", entwickelt im Verbundprojekt INGMEDIA an den Fachhochschulen Aachen und Zweibr{\"u}cken, tr{\"a}gt als neuartiges Lern- und Lehrmodul dieser Forderung Rechnung. Die Studierenden lernen einen vollst{\"a}ndigen Fertigungsprozess mit Hilfe von virtuellen, in LabVIEW programmierten Maschinen kennen, bevor sie die reale Prozesskette im Reinraum durchf{\"u}hren.}, subject = {LabVIEW}, language = {de} } @article{KaemperPicardBrilletal.2003, author = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlev and Jentsch, Andreas and Merten, Sabine and Rollwa, Markus}, title = {The Virtual Clean Room - a new tool in teaching MST process technologies}, year = {2003}, abstract = {The Virtual Clean Room - a new tool in teaching MST process technologies University education in high-technology fields like MST is not complete without intensive laboratory sessions. Students cannot fully grasp the complexity and the special problems related to the manufacturing of microsystems without a thorough hands-on experience in a MST clean room.}, subject = {Virtuelle Maschine}, language = {en} } @misc{Kaemper2007, author = {K{\"a}mper, Klaus-Peter}, title = {Skript zur Vorlesung Mikrotechnik 1}, year = {2007}, abstract = {Kennwortgesch{\"u}tzter Zugang nur f{\"u}r Studierende bei Prof. Dr. Klaus-Peter K{\"a}mper. Sommersemester 2007. Version 2.3 vom 27.02.2007 I-8, 484 S.: Ill.; graph. Darst. Inhaltsverzeichnis: 1 Einf{\"u}hrung: Was ist Mikrotechnik? 2 Fertigung im Reinraum 3 Der Werkstoff Silizium 4 D{\"u}nnschichttechnologie 5 Photolithographie 6 {\"A}tztechnologie 7 „Bulk Micromachining" 8 „Surface Micromachining" 9 Trocken{\"a}tzen tiefer Mikrostrukturen 10 LIGA-Technik 11 Mikrofunkenerosion 12 Laser in der Mikrotechnik 13 Mechanische Mikrofertigung 14 Photostruktuierbares Glas 15 Aufbau- und Verbindungstechnik}, subject = {Mikrosystemtechnik}, language = {de} }