@inproceedings{MertenConradKaemperetal.2006, author = {Merten, Sabine and Conrad, Thorsten and K{\"a}mper, Klaus-Peter and Picard, Antoni and Sch{\"u}tze, Andreas}, title = {Virtual Technology Labs - an efficient tool for the preparation of hands-on-MEMS-courses in training foundries}, year = {2006}, abstract = {Hands-on-training in high technology areas is usually limited due to the high cost for lab infrastructure and equipment. One specific example is the field of MEMS, where investment and upkeep of clean rooms with microtechnology equipment is either financed by production or R\&D projects greatly reducing the availability for education purposes. For efficient hands-on-courses a MEMS training foundry, currently used jointly by six higher education institutions, was established at FH Kaiserslautern. In a typical one week course, students manufacture a micromachined pressure sensor including all lithography, thin film and packaging steps. This compact and yet complete program is only possible because participants learn to use the different complex machines in advance via a Virtual Training Lab (VTL). In this paper we present the concept of the MEMS training foundry and the VTL preparation together with results from a scientific evaluation of the VTL over the last three years.}, subject = {Virtuelles Laboratorium}, language = {en} } @article{KaemperSchulzEhrfeldetal.1994, author = {K{\"a}mper, Klaus-Peter and Schulz, C. and Ehrfeld, W. and Erbel, R.}, title = {LIGA Fabricated Microsystems for Medical and Related Applications. Schulz, C.; Ehrfeld, W.; Erbel, R.; K{\"a}mper, K.-P.; Koch, L.; Lehr, H.; Roth, T.}, series = {3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...]}, journal = {3-Day Course on Microengineering in Medicine and Biology and its Applications to Minimally Invasive Techniques for Therapy and Medical Diagnosis : EURO-BME 94; October 5, 6, and 7, 1994, Swiss Federal Institute of Technology, EPFL, Lausanne, Switzerland / [the 1994 EURO-BME Microengineering in Medicine and Biology Training Course. Staff: Christian D. Depeursinge ...]}, publisher = {REPRO EPFL}, address = {Lausanne}, pages = {Getr. Z{\"a}hlung : Ill., graph. Darst.}, year = {1994}, language = {en} } @article{KaemperSchmittWesneretal.1989, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and Wesner, D. A. and G{\"u}ntherodt, G.}, title = {Thickness dependence of the spin- and angle-resolved photoemission of ultrathin, epitaxial Ni(111)/W(110) layers}, series = {Applied Physics A: Materials Science and Processing. 49 (1989), H. 6}, journal = {Applied Physics A: Materials Science and Processing. 49 (1989), H. 6}, isbn = {1432-0630}, pages = {573 -- 578}, year = {1989}, language = {en} } @article{KaemperSchmittGuentherodtetal.1987, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G. and Gambino, R. J.}, title = {CrO2—A New Half-Metallic Ferromagnet? K{\"a}mper, K.-P.; Schmitt, W.; G{\"u}ntherodt, G.; Gambino, R. J., Ruf, R.}, series = {Physical Review Letters. 59 (1987), H. 24}, journal = {Physical Review Letters. 59 (1987), H. 24}, isbn = {1079-7114}, pages = {2788 -- 2791}, year = {1987}, language = {en} } @article{KaemperSchmittGuentherodt1987, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {The influence of adsorbates on the spin-resolved photoemission of Ni(110). Schmitt, W.; K{\"a}mper, K.-P.; G{\"u}ntherodt, G.}, series = {Surface Science. 189/190 (1987)}, journal = {Surface Science. 189/190 (1987)}, isbn = {0039-6028}, pages = {741 -- 507}, year = {1987}, language = {en} } @article{KaemperSchmittGuentherodt1987, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Effect of adsorbates on the spin-polarized photoemission of itinerant ferromagnets. Schmitt, W.; K{\"a}mper, K.-P.; G{\"u}ntherodt, G.}, series = {Physical Review B. 36 (1987), H. 7}, journal = {Physical Review B. 36 (1987), H. 7}, isbn = {1095-3795}, pages = {3763 -- 3768}, year = {1987}, language = {en} } @article{KaemperSchmittGuentherodt1988, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Thickness dependence of the electronic structure of ultrathin, epitaxial Ni(111)/W(110) layers.}, series = {Physical Review B. 38 (1988), H. 14}, journal = {Physical Review B. 38 (1988), H. 14}, isbn = {1095-3795}, pages = {9451 -- 9456}, year = {1988}, language = {en} } @article{KaemperSchmittGuentherodt1990, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Temperature and wave-vector dependence of the spin-split band structure of Ni(111) along the \&\#915;-L line}, series = {Physical Review B. 42 (1990), H. 16}, journal = {Physical Review B. 42 (1990), H. 16}, isbn = {1095-3795}, pages = {10696 -- 10705}, year = {1990}, language = {en} } @article{KaemperSchmittGuentherodt1988, author = {K{\"a}mper, Klaus-Peter and Schmitt, W. and G{\"u}ntherodt, G.}, title = {Temperature dependence of the exchange splitting of Ni along the \&\#61511;-L line}, series = {Journal de physique. 49 (1988), H. 12. Supplement, Colloque C8}, journal = {Journal de physique. 49 (1988), H. 12. Supplement, Colloque C8}, pages = {39 -- 40}, year = {1988}, language = {en} } @article{KaemperPicardBrilletal.2003, author = {K{\"a}mper, Klaus-Peter and Picard, Antoni and Brill, Manfred and Cassel, Detlev and Jentsch, Andreas and Merten, Sabine and Rollwa, Markus}, title = {The Virtual Clean Room - a new tool in teaching MST process technologies}, year = {2003}, abstract = {The Virtual Clean Room - a new tool in teaching MST process technologies University education in high-technology fields like MST is not complete without intensive laboratory sessions. Students cannot fully grasp the complexity and the special problems related to the manufacturing of microsystems without a thorough hands-on experience in a MST clean room.}, subject = {Virtuelle Maschine}, language = {en} }