@article{SchoeningNaetherAugeretal.2004,
  author    = {Sch{\"o}ning, Michael Josef and N{\"a}ther, Niko and Auger, V. and Poghossian, Arshak and Koudelka-Hep, M.},
  title     = {Miniaturized flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and Su-8 technologies},
  series = {Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors},
  journal   = {Technical digest of the 10th International Meeting on Chemical Sensors, July 11 - 14, 2004, Tsukuba, Japan / Japan Association of Chemical Sensors},
  publisher = {Japan Association of Chemical Sensors},
  address   = {Fukuoka},
  pages     = {554 -- 555},
  year      = {2004},
  language  = {en}
}