@article{YoshinobuSchoeningFingeretal.2004,
  author    = {Yoshinobu, T. and Sch{\"o}ning, Michael Josef and Finger, F. and Moritz, W. and Iwasaki, H.},
  title     = {Fabrication of thin-film LAPS with amorphous silicon},
  series = {Sensors. 4 (2004), H. 10},
  journal   = {Sensors. 4 (2004), H. 10},
  isbn      = {1424-8220},
  pages     = {163 -- 169},
  year      = {2004},
  language  = {en}
}