@article{LuethThustSteffenetal.2000,
  author    = {L{\"u}th, H. and Thust, M. and Steffen, A. and Kordos, P. and Sch{\"o}ning, Michael Josef},
  title     = {Biochemical sensors with structured and porous silicon capacitors},
  series = {Materials Science and Engineering B. 69-70 (2000)},
  journal   = {Materials Science and Engineering B. 69-70 (2000)},
  isbn      = {0921-5107},
  pages     = {104 -- 108},
  year      = {2000},
  language  = {en}
}