@article{HagemannBachmannLadeetal.1994, author = {Hagemann, Hans-J{\"u}rgen and Bachmann, P.K. and Lade, H. and Leers, D.}, title = {Diamond chemical vapor deposition: gas compositions and film properties / Bachmann, P.K.; Hagemann, H.-J.; Lade, H; Leers, D.; Picht, F.; Wiechert, D.U.; Wilson, H.}, series = {Diamond, SiC and nitride wide bandgap semiconductors : symposium held April 4 - 8, 1994, San Francisco, California, U.S.A. / ed.: Calvin H. Carter, Jr. ...}, journal = {Diamond, SiC and nitride wide bandgap semiconductors : symposium held April 4 - 8, 1994, San Francisco, California, U.S.A. / ed.: Calvin H. Carter, Jr. ...}, address = {Pittsburgh, Penn.}, isbn = {1-55899-239-1}, pages = {267 -- 277}, year = {1994}, language = {en} }