@article{Schoening2003, author = {Sch{\"o}ning, Michael Josef}, title = {Silicon-based biochemical sensors}, series = {CNI - The Center of Nanoelectronic Systems for Information Technology}, journal = {CNI - The Center of Nanoelectronic Systems for Information Technology}, publisher = {Foschungszentrum J{\"u}lich}, pages = {165 -- 170}, year = {2003}, language = {en} }