@article{Foerster2003,
  author    = {F{\"o}rster, Arnold},
  title     = {Layer Deposition I},
  series = {Fundamentals of nanoelectronics / Stefan Bl{\"u}gel ... (ed.). - (Lecture manuscripts of the ... Spring School of the Department of Solid State Research ; 34). - (Schriften des Forschungszentrums J{\"u}lich : Materie und Material ; 14 ; 34)},
  journal   = {Fundamentals of nanoelectronics / Stefan Bl{\"u}gel ... (ed.). - (Lecture manuscripts of the ... Spring School of the Department of Solid State Research ; 34). - (Schriften des Forschungszentrums J{\"u}lich : Materie und Material ; 14 ; 34)},
  publisher = {Forschungszentrum, Zentralbibliothek},
  address   = {J{\"u}lich},
  isbn      = {3-89336-319-X},
  pages     = {C2.1 -- C2.13},
  year      = {2003},
  language  = {en}
}