@article{SchaeferBoegeShanjiaetal.1994,
  author    = {Sch{\"a}fer, Horst and Boege, P. and Shanjia, Xu and Xinzhang, Wu (u.a.)},
  title     = {Improved conductivity-measurement of semiconductor epitaxial layers by means of the contactless microwave method},
  series = {Conference digest : 10 - 14 January 1994, San Diego, California / International Conference on Millimeter and Submillimeter Waves and Applications / Mohammed N. Afsar, chair/ed.},
  journal   = {Conference digest : 10 - 14 January 1994, San Diego, California / International Conference on Millimeter and Submillimeter Waves and Applications / Mohammed N. Afsar, chair/ed.},
  publisher = {SPIE},
  address   = {Bellingham, Wash.},
  isbn      = {0-8194-1558-8},
  pages     = {649 -- 658},
  year      = {1994},
  language  = {en}
}